Dissatisfied with the throughput limitations of your current air- bearing wafer processing platform? Aerotech's PlanarHD
is the answer.
This high dynamic, high throughput air-bearing provides 2 m/s scan velocities and 5 g acceleration with 450 mm wafer scalability. Each element of the PlanarHD
is
designed for maximum dynamic performance.
• 5 g acceleration and 2 m/s scan velocity provide a 4X increase in throughput
• Dual encoder feedback on step axis minimizes turn-around time
• Integral water cooling allows higher rms acceleration and improved geometric performance
• Advanced control features like Iterative Learning Control dramatically improve dynamic performance
• Ultra-low latency Position Synchronized Output (PSO) triggers external events based on real-time position data
Dedicated to the Science of Motion
www.aerotech.com
Aerotech Ltd, Jupiter House, Calleva Park, Aldermaston, Berkshire RG7 8NN - UK Tel: +44 (0)118 940 9400 - Email:
sales@aerotech.co.uk
A e r o t e c h Wo r l d w i d e United States • Germany • Uni ted Kingdom • Japan • China
AH0711LTD_PlanarHD
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