ChemiSTEM™ technology A revolution in EDX analytics


Large map, all elements High sensitivity Light element detection


45 nm


45 nm PMOS structure 600 x 600 pixels Drift correction applied


10 nm


Au/Pt(Fe) core/shell particles < 5 nm 300 x 300 pixels recorded in < 4 min


Sample courtesy of C. Wang, V. Stamenkovic, N. Markovic and N.J. Zaluzec, Argonne National Laboratory


1 μm


Boron distribution in TiB/TiAl 512 x 512 pixels recorded in < 5 min 100 µsec dwell time; multiple frames


Sample courtesy of Ohio State University


Tecnai Osiris™


ChemiSTEM™ technology, higher beam current and revolutionary X-ray detection capability:


• Largest solid angle for EDX detection: 0.9 sr • Ultimate speed: elemental maps in minutes • Highest sensitivity for light elements and low concentrations


© 2011. We are constantly improving the performance of our products, so all specifi cations are subject to change without notice. Learn more at FEI.com/research


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