Piezoelectric Actuation
and reliability to routinely enable such performance on the production floor (Figure 5) [3], and recently these platforms have found their way into the most advanced microscopy applications.
Conclusion Light microscopy is a broad field and getting broader every
Figure 5: Active isolation platform for instrumentation such as SEMs and life science microscopes (Technical Manufacturing Corp.).
Vibration Isolation As image resolution improves and as microscopy
techniques emerge from the lab and become incorporated into commercial tools and processes, protection from ambient vibrations becomes critical. Here, too, piezoelectric technology assists in advancing the field. Active vibration control technology has long been a mainstay of semiconductor microlithographic manufacturing and is fundamental to achieving today’s rapidly diminishing integrated circuit line widths, oſten smaller than 32 nm. Te leading active vibration control platforms depend on piezoelectric speed, resolution,
week as novel imaging techniques continue to be developed. A common thread is that these techniques are enabled and assisted by application of piezoelectric positioning mechanisms. If there is one thing that is predictable about the future of this field, it is that application needs and the capabilities of piezoelectric actuation will continue to chase each other—to the benefit of science and society.
References [1] PI (Physik Instrumente) L.P., “Piezotechnology: Fundamentals of Piezoelectricity.”
http://www.piezo.ws/ piezoelectric_actuator_tutorial/
Piezo_Design_part2.php (accessed May 2, 2011).
[2] SC Jordan and PC Anthony, Curr Pharm Biotechnol 10(5) (2009) 515–21. Full article at
http://www.bentham.org/cpb/ sample/cpb10-5/0008G%5B1%5D.pdf.
[3] S Jordan and W Wigglesworth, Eurasia Semiconductor II (2010) 24–27,
http://publishing.yudu.com/A1noip/ EASemicon112010/resources/
24.htm.
Custom apertures Aperture strips Beam acceptance apertures
FIB consumable replacement parts Extractors Suppressors
Large area plasma FIB milling service work
Oregon Physics LLC, 2704 SE 39th Loop, Suite 109 Hillsboro, OR 97123 USA
oplab@oregon‐
physics.com www.oregon‐
physics.com Tel/FAX: +1‐503‐601‐0041
36
www.microscopy-today.com • 2011 July
Vias fabricated at IMEC while developing their fabrication process.
Plasma FIB cross‐sectioned and imaged at Oregon Physics.
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