TECH FOCUS: OPTICAL METROLOGY


precision detection of film thickness and trench depth during the etching/deposition process. Depending on applications, the LEM camera includes a 670 or 905 or 980nm laser and when mounted on any dry etch/deposition process chamber with a direct top view of the wafer this generates a small laser spot on the sample surface. Jenoptik offers a variety of optical systems, components, and modules, including lasers and optics used in metrology and industrial applications. The company can offer standard as well as bespoke solutions depending on customers needs. The Profilm3D and


Profilm3D-200 optical profilometers from KLA are designed to be affordable, non-contact, white light interferometry-based (WLI) 3D surface topography measurement systems. The latest generation includes imaging modes that are designed to extend performance and value. Micro Laser Systems makes


free-space and fibre-coupled lasers with diffraction limited performance. Lasers from 350 to 2000nm are available with accessories for expanding or focusing the beam, fibre collimators, fibre focusers, tiny collimators and splitters to integrate with the pigtailed lasers. Custom assemblies for OEM users are also available. MKS Newport provides


interferometers and associated products such as collimators, optical delay lines, fibre optic in-line polarisers, adjustable fibre optic collimators, open-


www.electrooptics.com


and closed-loop nanofocusing objective lens mounts, sub- nanometer piezoelectric positioning resolutions, as well as fused silica interferometer flat optics. Nikon Metrology (part


of the Nikon group) offers a wide metrology product portfolio. Its range of products include optical inspection and mechanical 3D metrology solutions along with state- of-the-art vision measuring instruments and microscopes. OptoSigma offers a wide


range of optical components and systems, including mirrors, lenses, stages, and optical tables that are well suited to metrology applications. It is an interesting and growing range. Polytec specialises in optical measurement technology, including laser-based systems for metrology. The company’s products cover areas such as vibration measurement, surface metrology, and non-contact displacement measurement, making them suitable for applications in research and industry. Renishaw supplies metrology


and precision measurement equipment and optical systems, including laser encoders, laser calibration systems and motion control equipment. These systems are widely used for high-precision measurements in manufacturing and research environments. Thorlabs provides a


wide range of optics and photonics products, including interferometers, optical components, detectors, and measurement systems. Zygo Corporation specialises


Edmund Optics FEATURED PRODUCT


Superpolished Substrates for Metrology: TECHSPEC Superpolished Substrates are used in metrology applications including cavity-ring down spectroscopy, scatterometry, and in ring laser gyroscopes, as well as in UV medical applications such as eye surgery. These Substrates are superpolished on both surfaces to axchieve superior surface specifications, including ≤1Å RMS surface roughness, reducing scatter, making them ideal for UV or high-power laser applications where scatter is a concern. The low scatter of these windows also allows for their use as substrates for ion-beam sputtering (IBS) coatings. Alongside an off-the-shelf offering in various sizes, in-house


manufacturing and metrology enable the production of custom sizes and shapes from 6 to 76.2mm and Surface Roughness <0.5Å. Please contact us if your application requires a Superpolished Substrate with a custom size, if you are interested in custom coating opportunities, or to discuss how these low scatter substrates will affect your coated optic performance. Single side superpolishing is also available Further information: www.edmundoptics.co.uk


in the design and manufacture of advanced optical metrology instruments and systems, ultraprecise optical components and assemblies, and provides electro-optical design and manufacturing services.


This is not an exhaustive list.


If you provide products and solutions for optical metrology and would like your company to be included, please let us know at: editor.electro@europascience. com EO


February 2024 Electro Optics 37


Page 1  |  Page 2  |  Page 3  |  Page 4  |  Page 5  |  Page 6  |  Page 7  |  Page 8  |  Page 9  |  Page 10  |  Page 11  |  Page 12  |  Page 13  |  Page 14  |  Page 15  |  Page 16  |  Page 17  |  Page 18  |  Page 19  |  Page 20  |  Page 21  |  Page 22  |  Page 23  |  Page 24  |  Page 25  |  Page 26  |  Page 27  |  Page 28  |  Page 29  |  Page 30  |  Page 31  |  Page 32  |  Page 33  |  Page 34  |  Page 35  |  Page 36  |  Page 37  |  Page 38  |  Page 39  |  Page 40  |  Page 41  |  Page 42  |  Page 43  |  Page 44  |  Page 45  |  Page 46  |  Page 47  |  Page 48