Feature: Sensors
Figure 1: PE load washer sensor with charge amplifier and programmable logic controller
acceleration and temperature changes during measurement. If they can’t be avoided, it is necessary to implement measures to overcome their influence. Furthermore, users should provide good cable insulation and routing, as well as compensate the reset/ operate jump with a PLC or evaluation systems like Kistler’s maXYmos, for example. Inline measurement with force
sensors mounted on the semiconductor manufacturing equipment offers important possibilities. Together with the charge amplifier and process evaluation unit, inline sensors allow users to record and assess the applied force, and then optimise the production process based on the collected assembly data. Since inline measurement chains allow for measuring and recording the force of every production step, they are suitable for automatic inspection of mass- produced items, which also entails traceability for each piece.
Accurate measurements Resolution is defined as the ability of the measurement system to detect and accurately indicate small changes in the characteristic of the measurement result. Even with forces as low as 1N, PE force measurement can achieve resolutions of below 0.01N. In addition, PE measurement enables quality parameters such as repeatability or serial precision, which helps determine the accuracy of repeated measurements between identical production steps. Users can take advantage of this to use relative instead of absolute measurement. In the past, piezoelectric force
measurement technology in semiconductor fabrication was mainly used for machine verification and highly-accurate wire bonding, wafer grinding and polishing. Today, the technology is used in a growing
number of applications throughout the semiconductor industry, in front- and back- end processes as well as in testing, sorting and taping; see Table 1. Manufacturers can profit from these
sensors’ long lifespan and compact sizes. Te benefits for production itself are manifold: improved machine performance, increased product quality, reduced ppm failure rate and, ultimately, lower costs.
Table 1: Semiconductor manufacturing processes requiring force measurements
www.electronicsworld.co.uk July/August 2021 25
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