32 Air Monitoring New brochure for a new era in process gas analysis
Hiden Analytical develops and supplies instruments for a new era of process gas analysis from UHV to Atmospheric Pressure. The latest in the range of product showcase brochures, HPR-30 Series offers an insight into the range of instruments, sampling inlets and software packages.
The Hiden HPR-30 Series are bolt on vacuum process analysers designed for fast response, high sensitivity analysis of gas and vapour species. Equipped with Hiden’s multi-level software package, offering simple control of mass spectrometer parameters and complex manipulation of data and control of external devices. Applications include leak detection, contamination monitoring, process trend analysis and analysis of high mass species and precursors used in ALD and MOCVD. Standard mass range is 200 amu, versions up to 1000 amu are offered.
Optional upgrades include the innovative Hiden 3F series triple fi lter quadrupole system providing enhanced abundance sensitivity, part- per-billion (ppb) detection levels and high contamination resistance, particularly suited to the analysis of aggressive gases in CVD and RIE applications.
Multiple sampling confi gurations are offered to suit a full range of process pressure and vacuum system geometry requirements. Versions are offered with single, or multiple sampling inlets, either unheated or heated to allow sampling of volatile species. Systems are offered cart mounted, and with height adjustment for maximum compatibility between tools. For pulsed deposition processes, time resolved measurements are offered to 50 ns time resolution. The HPR-30 Series are designed to offer a fully featured, fl exible and powerful solution for the monitoring of parameters in all aspects of process gas analysis such as leak detection, vacuum quality and precursor monitoring.
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Compact, advanced, precise fi ne dust monitoring instrument becomes fully EN 16450 certifi ed
The Fidas® Smart System developed by Palas GmbH is now fully EN 16450 certifi ed. It received approval for PM10 from TÜV Rheinland on 14th November 2022. Approval for PM2.5 was already granted in April 2022, making Fidas® Smart 100 the world’s smallest fi ne dust monitor for regulatory measurements to determine ambient air quality.
For the Fidas® Smart system, the proven and modern technology of the Fidas® 200, which is also EN 16450 certifi ed, has been further developed. Both devices use the principle optical light scattering measurements as well as an extended signal analysis for the simultaneous and precise determination of PM10 and PM2.5. Like all Palas® fi ne dust measuring devices, they can be calibrated directly and easily by the operator on site.
With a control unit dimension of 240 - 320 - 190 mm, the measuring device is as large as a shoebox and can be conveniently used even in tight spaces and diffi cult installation conditions. An already integrated WLAN and LTE functionality facilitates wireless installation and enables fast deployment.
In addition to its compactness, the Fidas® Smart System features even lower power consumption compared to the Fidas® System. In 24/7 operation, this saves the user several thousand euros per year compared to devices from other manufacturers. The system is available in different confi gurations and can therefore be adapted to budgetary requirements. The Fidas® Smart system provides data on the sources of particulate matter and thus supports the assessment of emissions from road traffi c or other carbon-based sources. This allows, for example, traffi c control for air pollution control to be more effi cient.
Fidas® Smart 100 is optionally available with a sampling tube for installation in measurement containers.
Like the Fidas® System, the Fidas® Smart System can also be connected to the cloud-based data platform MyAtmosphere. net. This enables continuous, intuitive recording and visualisation of all measured values from different stations in real time.
In accordance with the EN 16450 standard, the system has proven its reliability and equivalence to the gravimetric reference in laboratory tests as well as in a wide range of fi eld tests at different times of the year.
The compact design of the device enables authorities, environmental associations, and industry to set up measuring points very easily, to expand the number of measuring points or to use it for hotspots in a variable and legally compliant manner without the need for an elaborate measuring infrastructure.
Both the WHO and the EU have emphatically demanded a further tightening of the limit values as well as an increase in the number of measuring points. With the Fidas® Smart System, Palas offers tailor-made and effi cient solutions for the future fi ne dust monitoring challenges.
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IET JANUARY / FEBRUARY 2023
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