NEW TECHNOLOGIES | FEATURE
resins are standard photopolymers as used in semiconductor industry, and more exotic materials such as hydrogels. Nanoscribe also develops its own photoresists to enable the printers’ maximum performance with respect to resolution or writing speed. Te polymer structures can be printed on a broad range of substrates with different chemical and physical properties. Te choice of the right substrate material depends on the type of application. For optical applications, a transparent substrate material like glass is used. Here, the substrate is solely providing a support to the polymer structures. Pre-structured substrates like opaque IC-wafers or transparent micro fluidic chips can also be used to print polymer structures upon. In that way, the 3D printing process provides an elegant way to combine the substrate with optical or mechanical parts, thereby enhancing its functionality.
Despite numerous compatible photopolymers, there remain many classes of non-polymerisable materials that cannot be used to fabricate 3D structures in a one-step-procedure. However, there are different post-processing techniques available to transfer 3D polymer parts as lost casts for into, among others, metals, silicon, titania or silica. For 2D and 2.5D micro optical and diffractive optical elements, standard replication methods like imprinting and micro injection moulding can be applied for mass production. Here, the Photonic Professional GT is used as a valuable tool for master fabrication.
Nanoscribe GmbH
www.nanoscribe.de
<< Figure 3: Micro gear fabricated by means of 3D laser
lithography. >>
<< Figure 4: A prototype of a micro nozzle for the precise formation of liquid micro droplets. >>
LOOKING FOR A MICRO-SCALE
MANUFACTURING PARTNER? WE MANUFACTURE YOUR MICROSTRUCTURES USING
MEMSTECHNOLOGY:
UTILIZING OUR STATE-OF-THE-ART 200mmWAFER MEMS FOUNDRY SILICON OR GLASS WAFER SUBSTRATES AS START MATERIAL ENABLING SUB-MICRON FEATURES OFFERING PZT, Au AND A WIDE RANGE OF METALLIZATION OPTIONS DELIVERING UNPARALLELED PRECISION, REPEATABILITY AND QUALITY
WWW.SILEXMICROSYSTEMS.COM 31 | commercial micro manufacturing international Vol 7 No.6
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