MicroscopyInnovations
High-volume enterprises, such as semiconductor manufac- turers, frequently employ FIB systems to process a large quantity of TEM specimens. T ese FIBs use high-energy ions to process specimens quickly, but this oſt en results in specimen damage— amorphization and gallium implantation. For TEM specimens that need the highest quality preparation, the PicoMill system delivers ultra-low ion beam energies (as low as 50 eV) to the specimen. T e PicoMill system is well suited to microelectronics applications. Shrinking sizes and increasingly complex geometries in microelectronic systems, such as three- dimensional FinFET gate architectures and vertical NAND gates, place extra demands on specimen preparation technol- ogies. T ese devices have dissimilar materials with structures that may contain repeating layers of oxides, silicides, nitrides, and a mix of high-k and low-k dielectric materials. Such devices oſt en employ materials that have very diff erent sputter rates and, at the same time, may possess layer thicknesses of just a few atoms.
OneView™ Camera Gatan, Inc.
Developers: Paul Mooney, Matthew Lent, Ed James, and Cory Czarnik
× 4 k images at near-TV rates to support a variety of transmission electron microscopy (TEM) applications. Using a proprietary CMOS sensor plus an
T e OneView™ camera captures 4 k
ultra-fast built-in shutter, individual frame output takes place in 40 ms to permit an acquisition rate of 25 individual frames per second (fps). T is ensures a “live” experience when optimizing settings for individual images or acquiring high-speed videos. Users can further defi ne the experimental fi eld of view to allow video recordings over a range of resolution and speed combina- tions, from 4,096 × 4,096 pixels at 25 fps, to 512 × 512 pixels at 300 fps. Compared to previous technologies, users no longer have to decide between high quality, high frame rate, or high dynamic range.
When acquiring a one-second exposure frame, 25 individual frames can be summed together by the OneView camera to create a single image. During acquisition, images can be automatically optimized for exposure time, signal-to-noise ratio, or total specimen dose. T e ability to sum frames extends the dynamic range of the fi nal image beyond 16-bits to address the widest range of applications. Combined with a proprietary driſt correction algorithm and in-line data processing, individual frames are aligned and then summed in real-time. Accompanied by a redefined Gatan Microscopy Suite
3 user interface, the OneView camera features a novel LookBack feature for in-situ applications. When not recording experi- ments, the camera can be continuously storing live images to disk for up to 20 seconds, allowing pre-record information to be stored to disk when the recording is triggered. T is means
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the user will never miss the start of an experiment again. Up to 15 minutes of continuous video can be stored directly to disk. T e spectrum of applications covers everything from basic
bright-fi eld imaging to diff raction (including diff raction movies) and 4D STEM imaging. T e camera off ers the highest temporal resolution of any scintillator-based camera available today, allowing for a wide range of in-situ applications. OneView is ideal for beam-sensitive materials, including zeolite or cryo-EM samples because the camera can spread a low-dose beam across a large number of frames to minimize specimen damage.
The Nanoworkbench Klocke Nanotechnik GmbH
Developers: Ivo Burkart, Eva Burkart, David Peters, and Volker Klocke
The Nanoworkbench is most easily described by analogy to light microscopy where at most light microscopes, people work with tools in their hands. Hand-eye coordi- nation allows complex work processes without the user thinking about it. The Nanoworkbench enables
hand-eye coordination in vacuum chambers by means of a new technology system that provides positioning at sub-nanometer resolution. The Nanoworkbench employs a comprehensive set of Nanorobotics for sample manipulation, handling, and preparation; while Nano-Sensing provides nano-analytics, topography measurements, precision mechanics, and modular electronics. These functions are combined with automation of the SEM/FIB for easy operation. All individual machine coordinates of the SEM/ FIB (field of view, focus point, stage coordinates) and of the Nanorobotics are transformed into a Global Coordinate System. The 1D-Nanofinger
sample and tool positions and to store these positions in global coordinates. The SEM/FIB is controlled to move the sample stage, change focus, and alter magnification automatically. Live images from the SEM/FIB are grabbed and transformed into global coordinates. A Live Image Positioning module allows the user to click on a location in the image, and a tool moves there. All modes of the SEM/FIB are controlled together within the Nanoworkbench software. Most operations executed manually with light optical stereo microscopes can now be done in any SEM/FIB system with a 0.5 nm tool movement resolution over a 20 × 20 mm 2 tool stroke. Previously risky vertical movements of tools are now done securely by Nanoworkbench automation. Users can create their own automation by simple teaching algorithms. The Nanoworkbench can be configured with ready-to-use applications software for NanoManipulation, NanoCutting, NanoCleaning, Force-Distance Measurement, NanoProbing, Particle Sorting, Tribology, or TEM Lamella Handling.
® is used as a “scout” to detect
www.microscopy-today.com • 2015 September
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