USA | FOCUS
then used to create features in the stainless steel or other metal workpiece with feature sizes as small as 7 micro meters and aspect ratios as large as 3 to 1. For deep etching applications, the silicon sidewalls are oxidised to prevent secondary discharges from sides of the silicon features to the metal workpiece. This helps extend the life of the silicon electrode. To remove debris, dielectric oil can be applied to the workpiece and electrode during the machining process. The etching rate is up to 5 μm/minute of stainless steel and the work has been extended to other metals such as titanium, with electrode areas of up to 25 mm2
.
During this multi-year project, a representative from Agilent Corporation was heavily involved in the project through bi-weekly meetings and making sure the research was tailored to the specific needs of Agilent.
This project was fabricated in the Lurie Nanofabrication Facility (LNF) at the University of Michigan. The LNF is an 18,000 square foot facility (1700 m2
) with 11,000 square feet (1000 m2 ) of class
1,000/100/10 cleanroom space. It is a multi-user facility with 300 internal University of Michigan users and 200 external users including many companies. The LNF is equipped with over 120 major state-of-the-art tools for 100 mm and 150 mm wafer processing plus the ability to process smaller pieces. In addition, the LNF has an extra 2,500 square feet (230 m2
) of a HEPA-
filtered clean space that is used for wet chemistry, processing with organics or biological samples, and mechanical finishing. The primary cleanroom supports processing with silicon, compound semiconductors and organic materials, for the fabrication of devices and micro systems with feature sizes down to 10 nanometers. With established technologies for a large range of applications in nano technology, the LNF is ideal for rapid feasibility assessment of ideas and pilot/low-volume products.
The Lurie Nanofabrication Facility is supported by 22 full time engineers and technicians whose primary responsibilities are to ensure that the equipment is well maintained and characterised and to train new users.
To summarise, the University of Michigan supports technology transfer and translational research through several different mechanisms. One mechanism is member access to cutting edge design, fabrication and characterisation equipment at the Lurie Nanofabrication Facility. Another mechanism is facilitated access to the students and faculty through the WIMS2
research center.
This facilitated access can include attendance at research meetings, consulting, intellectual property, prototype construction and sponsored research projects. Of course, the easiest and often most effective transfer of technology is done through projects where both parties are heavily engaged. WIMS2 is eager to engage with new companies and invites CMM readers to contact it through its website.
Acknowledgements Figures 1-3 are courtesy of Dr. Tao Li at the WIMS2
Center, the University of Michigan.
Funding for the research project in the precision machining of stainless steel research project was provided by Agilent Corporation.
http://wims2.org http://lnf.umich.edu
12 | commercial micro manufacturing international Vol 6 No.5 Research
The Lurie Nanofabrication Facility is supported by 22 full time engineers and technicians whose primary responsibilities are to ensure that the equipment is well maintained and characterised and to train new users.
<< Figure 4: A user in the Lurie Nanofabrication Facility cleanroom. >>
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