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nanotimes

Companies Facts

technology enables highest system availability, excel- lent particle performance and high throughput. The production-proven K465i provides ease-of-tuning for fast process optimization on wafer sizes up to 8 inches and fast tool recovery time after maintenance.

Furthermore, Veeco Instruments Inc. announced that United LED Shan Dong Corp., (ULED) a China-ba- sed joint venture between United Microelectronics Corp (UMC) and Epistar, has placed a multi-tool order for Veeco’s TurboDisc®

K465i™ Metal Organic

Chemical Vapor Deposition (MOCVD) Systems. The systems will be installed at ULED’s facility in Jining City, China for its high brightness light emitting diode (HB LED) manufacturing ramp. http://www.sait.samsung.com

major order from Greece. The National Center for Scientific Research (NCSR Demokritos) has bought an EBPG5000plusES system for one of its associated Institutes. Installed at the Institute of Microelectronics (IMEL), the system will be the first 100kV lithogra- phy system in Greece and assure multidisciplinary cutting-edge nano-research.

V

IMEL is one of Europe’s leading Research Institutes in the field of Silicon technologies that performs mul- tidisciplinary research. Professor Dimitris Tsoukalas, Director of IMEL, explains: “Due to the different fields of research carried out at the IMEL we had very special demands for the new patterning system. It not only had to be capable of a multi user environment but also had to provide high class and efficient nano- lithography in all areas of our activities spanning from nanoelectronic devices to sensors and MEMS/NEMS.

istec Lithography Inc., a leading supplier of electron-beam lithography systems, received a

The EBPG5000plusES is the perfect match to these requirements and it will allow IMEL to further impro- ve its position at the nanotechnology forefront.”

Rainer Schmid, General Manager at Vistec Lithogra- phy comments the order: “We are honoured to have received an order from an institute with such a repu- tation. The EBPG5000plusES will be the first 100kV system in Greece. That will not only enable the institute to maintain its leading role in national nano- research but also to participate in European research projects, networks of excellence, and technology platforms at the highest level.”

The Company announced the delivery and successful installation of the EBPG5000pES Lithography system at the newly established Melbourne Centre for Nanofabrication (MCN) in Australia. The MCN will be performing research in the areas of nanostructures and a wide range of other applications also associa- ted with the nearby Australian Synchrotron.

The EBPG5000pES is based upon reliable and well- proven system architecture. Its 100kV electron-optics provides a spot size down to <2.2nm, which enables nano-lithography structures smaller than 8nm to be routinely generated. The system incorporates an interactive graphical user interface (GUI) that pro- vides ease of use for diverse, multiuser, University type environments. Due to these features and its high degree of flexibility and user-friendly interface, the EBPG Series is appreciated worldwide in leading Research Centres and Universities with more than 80 systems shipped.

The machine will help the MCN to develop new technologies. “We will be able to write and etch fea-

11-02/03 :: February / March 2011