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technology from Carl Zeiss offers significant benefits over the existing state-of-the-art in meeting advanced nano manufacturing requirements. A high brightness, sub-nm probe of inert ion species offers the ability to perform accurate, precise, and controlled edits on extremely small features (sub 10nm) in high density components. A low lateral beam spread will result in tighter, better defined deposit geometries. In additi- on, Carl Zeiss’ unique GFIS technology enables supe- rior nano-patterning fidelity without residual metallic contamination relative to conventional Ga-FIB based technologies. The Gas Field Ion Source (GFIS) tech- nology uses a scanned beam of inert gas ions such as helium, rather than electrons typically used in scan- ning electron microscopes (SEM), to generate and pattern ultra-high resolution images and nanostruc- tures. The beam is produced by an atomically sharp tip and results in a probe with incredibly high bright- ness (>5X109 A/cm2

-sr at 30KeV) and extremely low

energy spread (<1eV) which can be focused into an extraordinarily small spot (<0.35nm). The unique in- teraction dynamics of the helium ion beam with the sample enables applications in diverse fields of na- notechnology, materials and biological sciences, and nanofabrication. The Orion Helium Ion Microscope from Carl Zeiss was the first commercial product based on the GFIS technology.

For the efficient and rapid detection of tuberculosis bacteria the World Health Organization WHO now recommends LED-fluorescence microscopy. With Primo Star iLED Carl Zeiss developed, in coopera- tion with FIND (Foundation for Innovative New Di- agnostics), a microscope aligned for this application. Optimal image contrast and ease of use allow a reli- able and rapid diagnosis. The economical and robust LED illumination can be switched to battery power

11-02/03 :: February / March 2011

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NanoFocus AG Lindnerstrasse 98 | 46149 Oberhausen Phone +49 (0) 208-62 000-0 | Fax +49 (0) 208-62 000 info@nanofocus.de | www.nanofocus.de WKN: 540066 | ISIN: DE 0005400667

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