GAS DETECTION
Acoustic imAger for mAnufActuring environments
F
PiD sensor technology to suPPort the semiconDuctor inDustry AgAinst voc exPosure
and careful fabrication, and the potential for exposure to VOCs (volatile organic compounds) during the process calls for the highest standard of sensors and monitoring – something ION Science, as a leader in PID (photoionisation detection) technology, can deliver. Throughout the fabrication process, many
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different types of VOCs and gases are used in the creation of miniature integrated circuits on silicon wafers. It is critical that during fabrication, the wafers are only exposed to the precise and desired amounts of VOC. Any unaccounted-for VOC, even at incredibly low levels, has the potential to interfere with the creation of the wafer and ruin the circuit. With demand for semiconductors at an all-time high, the risk of losing a batch of product due to improper monitoring is not something producers can afford to chance. Employing the highest level of sensor
monitoring in the semiconductor manufacturing facilities (known as fabs) is the best way to ensure product uniformity and to reduce the risk of defects from VOCs. Sensor monitoring in fabs has the added benefit of protecting workers, those who are working directly with the semiconductors and wafers, and local communities by monitoring and controlling off site emissions. Worker risk is highest in cleanrooms, where
a variety of chemicals are used throughout the stages of creating the wafers. Potential VOCs that workers could be exposed to include ethylene glycol, trichloroethylene and xylene, whilst as a result of certain processes, there is
here is no denying the importance of semiconductors in modern life. From smartphones to smart factories, these crucial pieces of technology are what make Industry 4.0 possible. Semiconductors require precise
a risk of benzene and formaldehyde exposure. As all of these pose serious health risks, even in low concentrations, monitoring for VOCs and protecting the health of workers takes a high priority in the fabs. As experts in VOC monitoring and PID
technology, ION Science have supported many semiconductor facilities in establishing appropriate monitoring technologies. ION Science’s leading range of MiniPID2 sensors, are renowned through the industry as the PID sensor of choice for monitoring and instrumentation. With a range of personal, portable and fixed instruments suitable for use in fabs, ION Science can protect everything from individual workers through to whole sites and units. For personal protection, the Cub range is the
ideal choice for workers. Worn within the breathing zone for fast and accurate detection of VOCs, the Cub range weighs a mere 111g, making it lightweight and comfortable to wear while working. To keep sites safe, the Falco fixed detector provides superior sitewide monitoring, and is able to withstand harsh conditions and temperatures without condensing. All ION Science instruments utilise the leading PID sensor technology to guarantee the highest level of detection in all circumstances. ION Science continues to support the
semiconductor industry with a range of high- quality sensors and instrumentation that protect against VOC exposure. In a new and exclusive guide, ION Science discusses the role of VOCs in semiconductor fabrication, and how to better understand the processes and ways of protecting sites and workers. Download the full guide from company’s website and learn more about how ION Science is supporting the semiconductor industry with leading PID technology.
ion science
www.ionscience.com
28 Winter 2021 | inDustriAl comPliAnce
luke Process Instruments has released its first fixed acoustic imaging solution. The SV600 Fixed Acoustic Imager enables users to detect, locate and visualise air and gas leaks or
changes in sound signatures across their process and equipment in real-time before they become costly problems. By using an array of sophisticated sound sensors and powerful SoundMap technology, the SV600 translates the sounds that it hears into a visual representation so users can quickly locate and quantify problem areas. The SV600 easily integrates with factory
systems and can serve as an early warning system that can quickly detect changes across compressors, pumps, pipes, conveyors or across product inspection and quality control processes, and much more with user-defined alarms. Remote evaluation options, meanwhile, help to minimise operator intervention, even in parts of the facility that are hard to reach.
“With automated acoustic imaging that the
SV600 brings, maintenance teams can visualise leaks or sound signature changes to factory equipment or assets, and prevent unscheduled maintenance and possible costly downtime, and at the same time improve factory safety by minimising operator intervention,” says Herman Warnshuis, president, Fluke Process Instruments. “We are excited to bring this new technology to customers across the globe and cannot wait to see how they utilise the technology to detect, locate and visualise sound signature changes or leaks in their process.” The SV600 can also be used as a payload for
Boston Dynamics’ agile mobile robot Spot, which takes inspection to the next level. Designed to go where other robots cannot go and to perform a broad number of tasks, Spot traverses large facilities or unstructured terrain to automate industrial inspections, monitor remote or difficult-to-access environments and provide situational awareness in remote settings. With the SV600 payload, Spot can be reconfigured to automate air and gas leak detection, increase maintenance team efficiency, greatly reduce safety risks and reduce energy costs.
fluke Process instruments
www.flukeprocessinstruments.com
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