TEST & MEASUREMENT
Overcoming Critical Temperature Challenges in Industrial and Semiconductor Processes
Temperature is a fundamental process parameter and the ability to measure it accurately is essential for achieving control, safety and compliance in various industrial applications.
A
dvanced Energy’s vice president of critical sensing and control products, Dhaval Dhayatkar, provides insights on industrial processes, temperature control challenges and the means to overcome them.
Elevated or controlled temperatures are rarely acceptable within industries handling volatile chemicals like the oil and gas sector. Maintaining temperatures below danger thresholds can literally be a matter of life or death. Industries often navigate regulatory controls by temperature monitoring to ensure compliance.
In industries such as pharmaceuticals or food and alcohol production, even a slight temperature deviation outside of control limits can result in the loss of entire batches. Similarly, uncontrolled temperature in semiconductor manufacturing. Even in areas where temperature might be overlooked, it still plays an important role. For example, HVAC systems operate Temperature can also be used to monitor the wear and tear in mechanical equipment moving parts, such as bearings, for preventative maintenance without unscheduled downtime.
Challenges in measuring temperature in industrial applications
Accurately and consistently measuring temperature, particularly under harsh conditions, poses major challenges. High humidity or corrosive and explosive environments can damage sensitive sensors. In environments with heavy machinery, motors or heaters, voltage and current spikes can lead to faulty readings.
Sensor degradation over time necessitates regular recalibration and proper sensor placement is critical for accurate measurements. Sensors often need to be
placement within cramped equipment can complicate access for recalibration. Typically, the temperature of a surface is measured by physically attaching the sensor to it, which is feasible only if the sensor is relatively small. However, if a thermally conductive sensor, such as a thermocouple, is attached to a small device such as an integrated circuit, the reading may be inaccurate, as the sensing element acts as a heatsink.
Overcoming temperature measurement challenges in semiconductor manufacturing
An example challenge in measuring temperature is semiconductor manufacturing. Here, minor temperature photolithography and etching processes, leading to defects and decreased yields. Effective thermal management ensures that optimal conditions are used for chemical reactions and layer deposition. Precise temperature control also controls stress on materials, preventing warping or cracking and maintaining the integrity of Angstrom-scale structures essential for advanced semiconductor devices. Traditional contact sensors, including thermocouples, are invasive and inaccurate due to heat transfer, so minimally invasive, non-contact devices are needed. This need for separation between the substrate and measurement is crucial in applications such as cleanrooms, laser annealing, UV curing and solar cell manufacturing due to high temperatures or high levels of chemical reactivity.
Advanced Energy’s Sekidenko 4100T multi-channel OFT, enable this separation without contacting the surface being measured.
a distance. Therefore, the device can be kept out of the harsh plasma chamber energy, ensuring accurate measurement at all times.
exceed the demands of an application. For instance, the 4100T pyrometer has an accuracy of ±1.5°C, a resolution of 0.001°C and a repeatability of ±0.1°C, thereby easily meeting the needs of Angstrom-era processes.
Summary
Accurate measurement of temperature is a and compliance of industrial processes, particularly in semiconductor manufacturing. The challenges in achieving precise temperature measurements are substantial, ranging from environmental interferences to the degradation of sensors over time. Advanced solutions such as non-contact Energy’s 4100T pyrometer provide a reliable way to overcome these obstacles. These innovations ensure that even in the most demanding environments, accurate temperature control is maintained, safeguarding the integrity of products and optimising process yields. As technology continues to evolve, so too will the methods for precise thermal measurement, empowering industries to achieve greater levels of operational excellence.
advancedenergy.com
MARCH 2025 | ELECTRONICS FOR ENGINEERS
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