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FEATURE SPRINGS & SHOCK ABSORBERS
KEEPING VIBRATION UNDER CONTROL DURING
SEMICONDUCTOR MANUFACTURING
Semiconductor manufacturing has received a lot of media attention in recent years. However, one crucial element to chip manufacturing that goes under the radar is the need for vibration control. In this article, we
reveal the inside story of Mason UK’s effort to provide effective vibration control at Europe’s largest semiconductor manufacturing facility
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t’s April 24, 2020, and only one flight is leaving Heathrow. Adam Fox, director of Mason UK, is one of only four people on that flight. He holds a formal letter explaining the need for his travel – the project he is working on is classified as essential works. His destination was one of the largest
manufacturing sites in Europe, and a company that produces semiconductor chips. Periodically, fabrication plants (fabs) require equipment upgrades. On this occasion, however, there is an entirely new plant to be constructed. The development of advanced semiconductors will be essential in producing meaningful advances in artificial intelligence, and recent supply chain issues are forcing Western governments to invest in sovereign capability. In early 2022, the European Commission put forward the European Chips Act with the intention of addressing the supply shortage and strengthening Europe’s position within
the global chip production market. Companies like Intel are looking to expand into Europe, with a new manufacturing plant due to open in Magdeburg in Germany in 2027. Although these manufacturing sites can be
vast, most of the equipment is not directly used in the manufacture of silicon chips. Manufacturing at the nanoscale requires highly controlled conditions, so the fabs require an extensive range of heating, cooling and filtration systems. This plant equipment makes up approximately ninety per cent of the equipment located at a typical fab. Such equipment ensures the correct
temperature, humidity level and particulate level for the optimal production of chips. However, while solving one problem, it also introduces another. Mechanical systems and HVAC systems all generate vibration which, if left unmitigated, could disrupt sensitive precision manufacturing processes and interfere with chip production. Vibration
46 DESIGN SOLUTIONS DECEMBER/JANUARY 2024 control is key to making these things work.
FROM SPECIFICATION TO DESIGN Providing effective mitigation for this vibration is a highly specialised area where few companies have the required capabilities. For those that are involved, it all begins with the specification. Chip manufacturers require repeatability. They want all of their plants to be built the same way, whether they are in Israel or Taiwan. Of course, local conditions mean some adjustments will be necessary, but the basic principles must be strictly adhered to. These principles are contained in the specification. “These are effectively our blueprints for how
we are going to manage the construction of these buildings,” said Fox. “Ordinarily, contractors might try to save money by deviating from the specification or favouring cheaper suppliers. For projects like this, compromises on quality and departures from the specification, however small,
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