New Workfl ows
Figure 12 : Elemental maps showing two phases in PZT from the same sample region as Figure 11 . These X-ray maps were retrieved from a spectrum image collected at 200 keV using a SuperX detector on a Talos F200X S/TEM.
region of interest. A guided, automated workfl ow has been described that permits various users, with a range of experience and expertise, to produce thin samples in about an hour that meet the requirements for repeatable high-resolution S/TEM analysis. T e net result is a signifi cant broadening of access to high-quality S/TEM analysis for researchers across many disciplines. T is workfl ow encourages an increase in laboratory productivity with concomitant reductions in per-sample cost.
Acknowledgements T e authors would like to thank Tom Nuhfer of Carnegie Mellon University for providing the AlGaN/GaN/AlN multilayer LED specimen and the Laboratory for Equipment and Materials Testing (LAPEM) for providing the bismuth doped PZT sample. Sample preparation and analysis was performed in the European and North American NanoPorts of T ermo Fisher Scientifi c.
References [1] LA Giannuzzi et al ., Mater Res Soc Symp Proc 480 ( 1997 ) 19 – 27 .
[2] B Van Leer and D Wall , Microsc Microanal 19 ( S2 ) (2013 ) 868 –6 9 .
[3] D Wall . “Ultra-Fast In-Situ S/TEM Sample Preparation.” FEI Company Application Note P/N 04AP-FR0111, FEI Company (2007).
[4] RM Langford and AK Petford-Long , J Vac Sci Technol A 19 ( 2000 ) 2186 – 93 .
[5] M Schaff er et al ., Ultramicroscopy 114 ( 2012 ) 62 – 71 . [6] LA Giannuzzi et al ., Introduction to Focused Ion Beams . Springer , New York , 2005 , p 247 – 68 .
[7] F Liu et al ., J Vac Sci Technol A 34 ( 2016 ) 041510 . [8] S Einfeldt et al ., Appl Phys 92 ( 2002 ) 118 – 23 . [9] A Klingon and S Srinivasan , Nat Mater 4 ( 2005 ) 233 –3 7 .
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