This page contains a Flash digital edition of a book.
WINTER 2015 CONTENTS


MICRO PRECISION ENGINEERING FOR MEMS AND NANOTECHNOLOGIES


COVER STORY


LISA PATHFINDER SPACE MISSION DEC 2015 - PI HELPS SCIENTISTS WITH SUB-MICRON PRECISION


11


MEMS Non-contact confocal displacement sensors are helping with


inspection of shape, size and surface topology of MEMS structures to nanometre resolution


8


MICRO FABRICATION Advanced micro


fabrication methodology is addressing the challenges involved with using the latest 3D chip stacking technology


WAFER PROCESSING Borosilicate glass carrier wafers are enabling faster laser de-bonding improvements in glass UV de-bonding


17 20


CONTENTS


PI Hexapods chosen for critical scientific space mission


The much anticipated launch of the LISA Pathfinder space mission will mark the birth of the next phase of an incredible project that will one-day help scientists look at the structure of galaxies and our early universe. Hexapods from Physik Instrumente (PI) were the ideal choice for the micro precision measurement


NEWS


4. X-ray prototype to revolutionise airport security with fast scanning


EDITOR’S CHOICE 5. Graphene production breakthrough


FEATURES


connectingindustry.com /MicroMatters


To ensure that you continue to receive your free personal copy of this magazine, please fill in the reader registration card, or register online at: www.connectingindustry.com


Micro Matters is sent free of charge to individuals who meet the publisher’s strict terms of control. Annual subscription rates are: UK - £39.00 Overseas - £90.00


ISSN 2059-4216 Micro Moulding...


ConnectingIndustry. London Road, Maidstone, Kent ME16 8LY.


Tel: 01622 687031 Fax: 01622 757646 www.datateam.co.uk


Registered in England No 1771113 © 2015 Datateam Business Media Ltd. London Road, Maidstone, Kent ME16 8LY


18.Micro Moulding: Eliminating material degradation


Wafer Processing...


20. Borosilicate glass carrier wafers enable faster laser de-bonding


Smart Systems Integration 2016...


20. Focusing on MEMS, NEMS, ICs and Electronic Components


The paper used in this magazine is obtained from manufacturers who operate within internationally recognised standards. The paper is made from Elementary Chlorine Free (ECF) pulp, which is sourced from sustainable, properly managed forestation.


EDITOR Michelle Winny Tel: 07595 298 729 mwinny@datateam.co.uk


MANAGING EDITOR Neil Mead Tel: 01622 699 110 nmead@datateam.co.uk


PUBLISHING DIRECTOR Kathryn Ambrose Tel: 01622 699 175


kambrose@datateam.co.uk


The statements and opinions expressed in connectingindustry/Micro Matters magazine are not those of the editor or Datateam Business Media Ltd unless described as such


NEXT ISSUE ...


/ MICROMATTERS


Microfabrication• MEMS • Micro Tooling • Test & Inspection • Smart System Integration • Nanotechnology • Bio electronics


MICROMATTERS | WINTER 2015 3


SALES MANAGER Jacqui Henderson Tel: 01622 699 116


jhenderson@datateam.co.uk


CLASSIFIED SALES Jack Pollard Tel: 01622 69 9165 jpollard@datateam.co.uk


Borosilicate glass carrier wafers


20


CLASSIFIED DESIGNER Kirsty Hood Tel: 01622 607 967


PRODUCTION Sarah Lamb Tel: 01622 607 974


CIRCULATION ENQUIRIES: Tel: 01825 749 900 datateam@pmps.info


MEMS... 8. Nanometre resolution confocal sensors cope with changes in texture and surface finish of laser-machined components


Post Show Review... 10. Micro Nano MEMS 2015


Euspen... 14. Transient & Edible Micro Electronics


Microfabrication... 17. Challenges of 3D chip fabrication


INSIDE THIS ISSUE


Challenges of 3D chip fabrication


17


Automation


DesignSolutions


ElectricalEngineering MicroMatters EnergyManagement


FactoryEquipment


IndustrialCompliance Instrumentation


IrishManufacturing


MaterialsHandling&Logistics


Process&Control


Page 1  |  Page 2  |  Page 3  |  Page 4  |  Page 5  |  Page 6  |  Page 7  |  Page 8  |  Page 9  |  Page 10  |  Page 11  |  Page 12  |  Page 13  |  Page 14  |  Page 15  |  Page 16  |  Page 17  |  Page 18  |  Page 19  |  Page 20  |  Page 21  |  Page 22  |  Page 23  |  Page 24  |  Page 25  |  Page 26  |  Page 27  |  Page 28