FEAT RE MACH N FEA ATURE
CHINEI E VISIONISION SYSTEMS M S
SPACE-SAVING AN D COST - EFFECTI E CAMERA SOLUTION
Board-level industrial cameras are cost-effective, space-saving solutions for engineers and OEM customers w o need to i tegrate i systems and equipment The ID me
Board-level dust al ca . ras are cost-effective, K
loé develops and manufactures a range of equipment used in
microtechnology fabrication, including maskless direct laser lithography systems and UV LED masking and mask aligner systems. The latter are used not only in the fabrication of microchips, but also in micro optics and biotechnology (Lab on Chip), to align photomasks with patterns present on silicon, a glass substrate or on a wafer and to expose the surface underneath .
MAK NG THE AL GNMEN MAKINGI
The electronic circuits of microchips, such as CPUs are ‘built’ from a series of different vertical layers. These layers have to be positioned exactly one above the other during the fabrication to ensure the correct electrical connection between the components in each layer. Alignment marks such as crosses, squares or micro rules are made on the first layer exposed on the wafer and these are then used to align the photomask for each subsequent laye r before UV exposure .
HE ALIIGNMENT ,
To make the alignment as accurate and as easy as possible, Kloé uses two USB2 uEye LE single-board cameras from IDS in each of its latest-generation UV-KUB 3 mask aligners. These are located directly on a special optical system, saving a lot of space with this solution. Both cameras are connected via USB 2.0 to a Linux-Embedded computer. The captured images are displayed on an integrated screen, allowing the magnified positioning marks to be visualise d directly on the device. Then, by using a joypad, the operator is able to align the photomasks exactly. Although binocular microscopes could be used, the desktop system with its board level cameras saves space. With a side length of only 47.5cm, it allows the exposure of five inch
16 16 DECEMBER/JANUAR 201 ANUARY 2017 | AU AUTOMA MAT ATION Kloé UV-KUB3 mask
Kloé UV-K B3 mask aligneraligner in actionin action
aking thema sui able choice for such appl ati ns since space is often limited in devices or embedded systems. The French manufacturer, Kloé uses them in its desktopm sk w iters, w ich are designed t o provi e fast and accurate al nment of photomasks
space-saving sol tions for engineers and OEM customers who need to integrate imaging into their systems and equipment. The IDS uEye LE series of single-board cameras measures just 36 x 36mm, making them a suitable choice for such applications since space i often l
agi g i to thei ye LE serie
me mm, ted i devices or embedded
systems. The Frenchm nufacturer, Kloé uses them in its desktop mask writers, which are designed to provide fast and accurate alignment of photomasks
photomasks on a wafer area of 100 mm diameter. When used with a large screen, it offers a better ease of use. By utilising simple imaging techniques such as
contrast enhancement and high dynamic range, an alignment accuracy of less than two microns can be achieved.
IDS uEye LE board-level camera
Ey camera S uEye LE board-level VERSAT L MAGING VERSATIILE I IMAGING
OEM customers such Kloé have individual requirements depending on their applications which in turn means that board level cameras must offer a wide range of functionality, image quality and resolution. The uEye LE series from IDS covers a wide range of variants to allow OEM customers to choose the camera that is equipped with the features they require to best meet their needs.
,
Models are available with GigE, USB 2.0, USB 3.0 interfaces, andmore recently, as USB 3.1 Gen 1 cameras with a USB Type-C connector. Similarly there are versions with different CMOS sensors and resolutions from0.4 up to 18Megapixels. They are available as single-board cameras without a lens holder, as single-board cameras with an S-mount or with a CS/C-mount and even as a housed version.
Kloé uses two UI-1242LEmodels per unit. This USB 2.0 version without lens holder is equipped with a very light- sensitive 1.3Megapixel (1280 x 1024) pixel monochrome CMOS sensor frome2v. In addition to the outstanding li ght sensitivity at CCD quality, the camera is characterised by a number of useful features: the sensor provides two switchable global and rolling shutter options, and thusmaximum flexibility in changing requirements and conditions. There is amaximumof four areas of interest available. An eight pin
Hirose connector featuring 5V power supply, trigger and flash, 2 GPIOs and an
provide nearly unlimi I2C bus to control pe
flexibility . I IN EGRATING HE AMERAS NTEGRATING THE CAMERAS
The IDS Software Suite is the SDK that is supplied with all IDS cameras and is available for Windows 7, 8 and 10, as well as for Linux and Linux Embedded. This SDK is identical for all models whether they have a USB 3.0, USB 2.0 or GigE interface giving OEM customers the flexibility for further feature extensions of their devices. Using the uEye API, part of the IDS Software Suite, Kloé has been able to integrate all sensor features of the board-level camera into their application quickly and easily. This versatility means that the integration of any IDS camera is independent of model and interface. Engin eers can easil y
change from a USB 2.0 camera to a more powerful model with USB 3.0 or Gigabit Ethernet interface. There is no need to redevelop the application, but only to adjust the camera-specific parameters. The IDS Software Suite also comes with programing demos for camera
integration and image acquisition with the corresponding source code in C, C ++ and Visual Basic. Developers can quickly extract parameters for use in their own programs There is also other machin e vision software available such as HALCON, MERLIC, NeuroCheck, or LabVIEW as well as direct interfaces.
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IDS Imaging Development Systems T: 0118 970 1704 ww.
www.ids-imaging.com
T: 01 8 970 1 04 www
/AUTOMATION AT /AUTOMATION
ted connectivity an d ripheral devices
SPACE-SAVING AND COST- EFFECTIVE CAM RA SOLU TIO N
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