AWARDSSHORTLIST
MiaSolé is the only commercially available solar thin film company that uses sputtering for every step of the CIGS deposition process. The most notable characteristics of the process are: 1. All sputtered 2. Continuous processing 3. Insitu selenization 4. Insitu anneal 5. Short cycle time 6. High efficiency.
minimal glass stress due to the elimination of heating cooling cycles. The end result is less glass breakage and consequently lower scrap costs and a higher yield.
Thin Film Innovation
Redesign of the existing equipment to enable handling and processing from 20 glasses/batch to 10 glasses/batch and adding gate valves between the transfer and the process modules results in a much faster system handling time (300% faster internal handling time). The strict vacuum isolation allows a contamination free processing of both pin structures.
Oerlikon Solar’s next generation KAI MT equipment,
Oerlikon Solar’s next generation KAI MT equipment, the world’s first industry proven PECVD mass production system for thin film silicon PV absorbers capable of depositing the complete tandem pin- pin junction in one system. The major features of the new equipment are: a) more advanced film properties for the amorphous and microcrystalline absorber films and b) significant increase in overall productivity by 50% at a reduced footprint of 50%.
What is particularly noteworthy ? - 50% higher productivity (throughput) at 50%less footprint - Advanced process capability based on proven 40MHz technology with well defined interface between amorphous and microcrystalline layer - Integrated Micromorph® process(no vacuum breakage between both absorber films) - Optimized temperature management during deposition(less heat & cooling cycles) - Contamination free processing enabled by the pressure differential in the Plasma Box® and the new gate valve isolation between the process chambers Innovative Aspect: The new capability to run a complete pin-pin tandem junction on the same equipment without breaking the vacuum, allows better temperature management of the glass producing
The new KAI MT is a perfect match between amorphous and microcrystalline process capacity; there is no longer any bottleneck in the availability of the total equipment. The capability to run an entire micromorph stack under vacuum in the same tool enables a higher back up and a higher redundancy which is the basis for higher fab uptime. To retain existing KAI benefits and already existing competitive advantages, the new KAI MT uses industry proven handling techniques and process components. The KAI MT is 100% process compatible to the existing KAI 1200.
Build on proven technology of Oerlikon Plasma Box® reactors the new KAI MT is now equipped with 30 reactors total with 10 reactor in each process chamber capable of depositing advanced amorphous and microcrystalline absorber films. This results totally in 43m2 PECVD process area with 40MHz technology. The new innovative layout and design of the equipment has the utilities and media interfaces on a separate top floor enabling shortest pumping pipes for the highest vacuum performance with a 50% footprint reduction. Advanced cleaning technology ensures up to 50% faster in situ cleaning of the process reactors.
How do customers benefit? New KAI MT System - Additional Customer Benefits High quality amoruphous and microcrystalline absorber material - Plasma Box —> retain existing benefits and competitive advantages - 40 MHz Technology - No vacuum breakage a-/uc-Si —>improved process control Higher Troughput - 42 m2 reactor surface —> 50% higher productivity - advanced cleaning and shorter gas/pump lines —> 50% reduced overhead time - 10 glasses batch size — > 3x faster internal handling - 1 x heat&cool —> less stress - higher yield - full “tandem” stack in one tool —> higher equipment uptime Space - 90m2 footpring —> 50% less footpring
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Thin Film Innovation
Solexant Corp.
Nanocrystal Solar Cells and Modules
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Solexant produces Nanocrystal Solar Cells and Modules capable of bringing the manufacturing costs of solar energy down to just 50 cents per watt. Environmental concerns mandate the use of renewable energy across the globe, but the main barrier to mass-market adoption to date has been cost. Solexant set out to reduce the installed cost of solar energy while also making solar manufacturing significantly less capital intensive. Solexant drew inspiration from the time-tested, cost- effective manufacturing methods of more established industries and applied them
www.solar-pv-management.com Issue V 2010
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