AWARDSSHORTLIST
demands high deposition rates over a large area. With our advanced chamber design and process optimization we are able to achieve 7A/sec in the field and 9A/sec on µc-Si film in the lab.
From a module efficiency standpoint, the key parameter for the µc-Si layer is uniformity. Large panels are desirable because they reduce the number of process and installation operations required for a given amount of finished device area.
However, large area plasma deposition introduces additional challenges. Plasma density tends to drop off significantly at the corners of the substrate, especially at higher plasma density. In our system architecture, innovative RF and diffuser technologies help to maintain uniform plasma density over the 5.7m2
substrate
area. We are able to achieve uniform plasma with 10% thickness range uniformity for µc-Si at 9A/sec deposition rate and 5% thickness range uniformity (
Solaris
With the advanced PECVD chamber design, amorphous single junction modules have achieved 6.5% efficiency and micormorph tandem junction modules 9.2% efficiency at the customer sites. Even higher efficiencies have been demonstrated in the lab on 1.1 X 1.4 modules.
PV Tool Award
The PV3000’s inherent accuracy and repeatability is an enabler of advanced Print-on-Print processes. Indeed, with such processes fast-becoming industry standard, the PV3000 achieves PoP capability to +/- 12.5 microns at 2 Cpk. The PV3000 also benefits from the PVD3000 solar cell dryer, developed in conjunction with Heller. An advantage over conventional IR-based dryers, the PVD3000’s drying technology creates improved air exchange within the process chamber which enables the dryer to manage the increased VOC volume associated with raised throughput.
PV3000
The DEK PV3000 line is a very high throughput complete metallization solution for commercial solar cell production. Deploying patented multiple print heads operating in parallel, the PV3000 virtually eliminates downtime to
In addition, the specialist catalyst incorporated within the process chamber converts the VOCs to simpler compounds such as carbon dioxide and water. An important by-product of the catalyst conversion is heat which, in turn, is used to enhance the drying process and reduce overall power consumption. The result is precise thermal control, improved VOC management and reduced power consumption - all on a compact footprint.
The Solaris is a very flexible, with one of the highest uptime mass production tool for crystalline solar cell production. The Solaris is designed for “silane free” front- and back side coating of crystalline silicon solar cells. Clean technology process for clean technology products! The Solaris system is using a single wafer sputtering process, which is not using a Silane gas.
What is particularly novel or noteworthy,is that Oerlikon is offering clean technology with the highest flexibility and one of the lowest CoO at footprint of only 7m2
. The
Solaris is designed for front- and back side coating of crystalline silicon solar cells. The Multi layer capability allows passivation and “silane free” SiN-AR (Anti Reflective) coating on the front side, with the freedom to select optical criterias (like refractive indices, etc.) of individual layers as well as passivation and metal layer deposition on the back side.
The unique design sets a new benchmark in the industry. It allows you to change your batch type production with very easy automation to a single wafer inline production at lowest footprint and highest productivity.
maximise productivity. If one head halts for operator attention, the others continue to print, thereby maximising operational efficiency and dramatically reducing downtime. With print speeds up to 600mm/sec, the PV3000 guarantees exceptional output while unprecedented handling capabilities minimise breakage for maximum yield.
Customer data feedback evidences this at less than 0.2%, compared to industry standard 0.3% breakage rates. Delivering six-sigma repeatability at class-leading accuracies, the PV3000 demonstrates capability in advance of current solar cell requirements. Such accuracy is ideal for depositing features like sub-100-micron current collectors and low-resistivity bus bars, and essential for demanding technologies such as selective emitter.
PV Tool Award
39
www.solar-pv-management.com Issue V 2010
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