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Products v2 4/2/10 11:35 Page 37
PRODUCTS
Controlled sputtering
Thermal
HÜTTINGER Elektronik is a world-wide output impedance. This allows the
performance
leader in innovative power supplies for generator to absorb critical reflected
industrial and high technology power in case of maladjustment without Thermco Systems manufactures high
applications. Its product range includes being damaged. Thus, CombineLine quality furnace systems for the
DC, medium frequency and RF power ensures high plasma stability. Photovoltaic, Semiconductor and
supplies with output from 300 watts to MEM’s industries. The Thermco
600 kilowatts. Higher power custom Moreover, this technology ensures that 5200PV photovoltaic production
solutions are also available. The main the generator delivers power reliably and furnace system is specifically
application areas for HÜTTINGER’s accurately over a broad impedance designed for photovoltaic applications
products are induction heating, plasma range. The results are stable processes where process performance,
processes and laser excitation. over all output ranges. In addition a new maintainability, reliability, high
procedure for power regulation offers the throughput and cost of ownership are
TruPlasma RF 1003 TruPlasma user a previously unavailable band width at the heart of the design concept. It is
DC Series 3000 of output power from 1 to 3 kilowatts at capable of processing both 125mm x
The TruPlasma DC Series 3000 is constant accuracy. The coating and 125mm and 156mm x 156mm
developed for sputtering processes. etching processes are supplied precisely substrates with full cassette to
Available with outputs of 2 to 120 with the process energy required in each cassette automation and back to back
kilowatts, these direct current generators case. In this way, the user can control the wafer processing available as options.
deliver a highly reliable continuous output processes efficiently, even at low power,
into the process. Moreover, the TruPlasma and achieve highly accurate
DC Series 3000 prevents electrical arcs reproducibility
by means of an arc management system
CompensateLine that is unique to the Another innovation is the integrated
photovoltaic market. converter topology that allows an
unrivalled efficiency of over 80 percent.
The TruPlasma RF 1003 is best suited for Because of this efficient energy
PECVD processes. It generates power in conversion, the TruPlasma RF 1003 cuts
37
a range from 1 to 3000 watts at a energy costs significantly for the user and
frequency of 13.56 MHz. Its special increases the cost-effectiveness of
www
characteristics: In the generation of high- production.
.solar
frequency current, it sets new standards
of energy efficiency and ruggedness. This HÜTTINGER Elektronik GmbH + Co. KG
-pv-management.com
provides highly continuous and stable www.huettinger.com Thermco has conducted extensive
processes at reduced costs. process design of experiment (DOE)
to make the process targeting
This is possible thanks to predictable and repeatable. The TMX
several patented control system provides high reliability
technologies. The and repeatability making process
generator possesses a calibration fast and secure. Statistical
Issue I 2010
high-frequency combiner Process Control (SPC) software can
technology, unique to the automatically track any unexpected
market. CombineLine deviation from the target. The
delivers a true 50 Ohm following processes are fully
characterised and guaranteed with
throughput typically >1200WPH on N-
type and P-type doping.
Coming in March
PV Production Proven
Processes
POCl3 N-Type Doping for surface and
The SOLAR
groove.
BBr3 P-Type Doping for surface and
Products Guide
groove.
SiN Silicon Nitride Anti reflective
coating (ARC)
To be included email:
H2 Anneal Bulk silicon passivation.
Wet Oxidation Surface passivation.
jc@angelbcl.co.uk
Thermco Systems
www.thermcosystems.eu
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