TECH FOCUS POSITIONING EQUIPMENT
Tech Focus sponsored by
PRO-LITE TECHNOLOGY FEATURED PRODUCT
for its small size thanks to the integration of compact piezo stages, high-quality joints, and low friction mechanical parts. Its closed loop control with linear optical encoders enables it to reach the highest precision performances. The NanoPos has a travel range of ±5mm/±10°, a resolution of 10nm/1µrad, a repeatability of ±38nm / ± 1µrad and a payload of 500g.
To meet maximum payload and form factor requirements for use as a single-axis positioner, as part of an integrated system or even an integrated machine, Aerotech’s ABRX air-bearing rotary stages are available in diameters of 100,
150 and 250mm. This makes them particularly suitable for exacting requirements in wafer inspection, high-precision metrology, optical inspection and manufacturing, and MEMS/nanotechnology device production. These rotary tables are directly driven and can achieve rotational speeds of up to 300rpm. Another special feature is the air bearing design, which minimises radial and axial errors, which are typically in the range of less than 25nm. This series is particularly suitable for high-precision test and inspection systems and surface measurement applications, including the measurement of roundness, flatness, form errors or other measured variables of profilometry.
Physik Instrumente’s V-817 high load linear stage series offers high price-to- performance in positioning solutions for highly dynamic and precise processing, testing, and inspection tasks in the semiconductor, electronics, and laser industries. The stage is suitable for applications such as sensor and camera
Nanomotion FB-Series Piezoelectric Motion Stages
The Nanomotion FB Series of motion control stages provides linear, rotary or vertical motion with nanometric precision. Based on a proprietary, standing-wave piezoelectric technology, Nanomotion motors and motion systems are suitable for a diversified range of applications where precise, nanometric control is required.
In photonics motion
control applications, how do you combine speed with nanometric precision and unlimited travel? These seemingly conflicting requirements are uniquely addressed by ultrasonic, standing-wave, direct-drive
positioning, laser welding, optical and tactile testing procedures, as well as wafer processing and inspection. These stages are designed
piezoelectric motors. This technology provides unlimited linear or rotary motion of a ceramic tip that transfers drive to a target, operating in a manner similar to a DC servo motor but with much higher resolution, an order-of- magnitude higher speed and a wider dynamic range. The Nanomotion FB Series of stages provides single or multi-axis motion performance for a wide range of applications in optical alignment in the semiconductor, biomedical, and analytical instrumentation markets. Find out more at: Nanomotion Piezoelectric Motors & Motion Systems
https://www.nanomotion.com/ product-type/standard-stages/
for industrial applications with high operating cycles: three-phase linear motors with recirculating ball-bearing guides offer constant loads up to 600N and velocities up to 3,000mm/s. In addition, the incremental linear encoder offers a resolution down to 0.3nm, ensuring high path accuracy, minimum tracking errors, and short settling times. The calibrated positioning
accuracy of the linear stages is up to ±2.5µm. The travel range extends to 813mm.
www.electrooptics.com | @electrooptics March 2021 Electro Optics 37 g
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