EVENT FOCUS: LASER WORLD OF PHOTONICS 3D-MICROMACFEATURED EXHIBITOR
HALL A2 BOOTH 129
imaging lenses and optical elements, as well as optics for CO2 and high-power fibre laser material processing. Newport offers solutions including motion control, optical tables and vibration isolation systems, photonic instruments, optical and opto-mechanical components. The Surround the Workpiece
Selective Laser Annealing System for Semiconductor, Power Device and MEMS Manufacturing
3D-Micromac will be exhibiting its new microPRO laser annealing system, designed to enable several key process steps in semiconductor, power device and MEMS manufacturing, such as: • Ohmic contact formation in silicon carbide (SiC) power devices to improve resistance
• Giant magneto resistive (GMR) and tunneling magneto resistive (TMR) sensor manufacturing
• Dopant activation for insulated gate bipolar transistors (IGBTs), as well as activation of backside- illuminated CMOS image sensors.
The system combines a state-
g Furthermore, with the optics of its new OTC series, Laserline is able to offer processing optics for welding and cladding applications. These affordable optics are available in five standardised versions and are optimally suitable for robotic applications, due to their compact design and low weight.
www.laserline.com
MKS Instruments Hall A2, Booth 209 MKS Instruments will present its Surround the Workpiece concept. The interactive
28 LASER SYSTEMS EUROPE SUMMER 2019
of-the-art laser optic module with 3D-Micromac’s modular semiconductor manufacturing platform and provides selective annealing in a versatile system. The microPRO features a
line scan option for vertical selective annealing and a step-and-repeat spot option for horizontal selective annealing, as well as three optional laser wavelengths. microPRO provides the
following benefits: • High precision, repeatability and throughput
• Excellent selectivity to different substrates and films
• Very high energy homogeneity
• Precise process monitoring • Multiple options for pulse length, pulse energy and overlap
More information:
www.3d-micromac.com
presentation at the MKS stand bundles the wide variety of products and services in the MKS Instruments Light & Motion division with its brands Spectra- Physics, Ophir and Newport. Spectra-Physics combines
laser technologies with deep application expertise to deliver lasers for precision industrial and scientific research applications. Ophir specialises in laser and LED measurement, including laser power and energy meters and laser beam profilers. Ophir also provides high-performance IR thermal
concept includes product design and development, system-level integration, research and development, component selection and maintenance, repair and calibration services in the field of laser-based guidance and control for manufacturing processes.
www.mksinst.com
Nuburu Hall B3, Booth 103 Nuburu will be presenting its high-brightness 500W blue (450nm) diode laser, the AO-500, which offers deeper penetration depth in materials processing applications involving gold, aluminium, and copper, among other metals. The blue light is absorbed much more by these reflective materials than the infrared wavelengths of conventional industrial lasers. The efficiency and quality
of materials processing applications are driven by power density. Increasing power density by a factor of four increases weld depth more than one-and-a-half times and increases the weld speed three
to four times. The AO-500 has an innovative design that individually aligns each of the output beams from sixteen multi-diode packaged chips, offering a high brightness. Early adopters are already leveraging the advantages of the high power and brightness in applications such as battery fabrication, automotive component production, e-mobility device fabrication, and electronic packaging.
www.nuburu.net
OPI Photonics Hall A3, Booth 217 OPI Photonics, an Italian innovative SME based in Torino, will be showcasing its line of beam switches and couplers for fibre lasers up to 10kW. These devices are essential in complex production lines, either for sharing the same fibre laser resource among different workstations (laser switches for time or power sharing) or to keep the process cable
separated from the laser feeding fibre (laser couplers). Fibre laser manufacturers
can integrate couplers and switches inside their sources as a value-added option; system integrators can find the right input-output fibre combination yielding the most effective solution for their production line. Both devices are fully customisable and OPI can provide its expertise to identify the best solution. The equipment is PL-e certified.
www.opiphotonics.com
PicoQuant Hall B2, Booth 216 PicoQuant will be presenting the latest additions to its photonics portfolio, the main highlight being the new Taiko PDL M1, a smart picosecond pulsed laser driver that can be used in combination with the laser
@lasersystemsmag |
www.lasersystemseurope.com
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