AUTOMATION & ROBOTICS
in certain cases below 50 degrees. More flexibility in the chemistry is also required, including potentially the use of fluorine and excellent control of the temperatures. All of this is much easier to accomplish with single wafer processing.”
According to Pleyer, customers may have a photoresist on a metal surface deposited between two metal surfaces requiring the removal of the photoresist from the side of the wafer. Due to its isotropic etch property, oxygen- based microwave plasma ashers can remove the photoresist in between the metal plates, unlike RF-based systems.
EASE OF SINGLE WAFER AUTOMATION
In manually loaded systems, the asher has a pull- out door where the wafers lie on the heating or cooling plane mounted on the entry door of the chamber. In automated systems, wafers are increasingly loaded into the chamber utilizing robotic handling.
“Today, customers want to reduce all human factors as chips continue to become more advanced,” said Pleyer. “This requires automatic handling and loading using robotics and full
control by a host computer. In some cases, the operator only needs to place the cassette onto the load port, which will start automatically.” PVA TePla, for example, has designed its GIGAfab-A plasma system to be configurable for 200- or 300-mm wafers and a cluster tool with up to 3 process modules called the GIGAfab Modular. Both systems use open cassette as well as front opening or standard mechanical load stations. Wafer processing is thermoelectrically controlled from RT to 250°C. A unique planar microwave plasma source provides high ash rates over a wide temperature range.
With wafers becoming thinner, more reliable automated single wafer processing equipment handles fragile wafers.
“Trying to handle the wafers physically without the use of robots can end poorly,” says Ryan Blaik, sales manager of semiconductor and medical devices at PVA TePla in California, Single wafer processing also provides better temperature controls.
“With batch processing, microwave radiation must heat all the wafers in a quartz boat, and the temperature can fluctuate during processing,” says Blaik. “For a single-wafer processing system,
wafers are brought into the chamber only after pre-heating, allowing a constant temperature to be maintained during processing.” In single wafer processing, a descum process can be accomplished using the same tool. The primary difference between the two processes is the temperature the wafer is exposed to while in the plasma chamber.
According to PVA TePla’s Pleyer, “For descum, we want a low ash rate and good uniformity and process control. Because we are only targeting removal of residues, an ashing recipe at very high temperatures will not work. It is easier to accomplish using single wafer ashing using a microwave-based plasma system.” As more semiconductor device fabrication continues to ramp up globally to meet an insatiable demand for chips, the need for control, efficiency, and configurable solutions for wafer ashing will continue as the chips themselves increase in complexity and decrease in size. Automated, single-wafer microwave plasma systems provide chip fabricators with targeted and configurable ashing that meets the needs of an increasing array of wafer types.
PVA TePla America
www.pvateplaamerica.com SM&E22_AD_Design-Solutions_2022-23_195Wx135H_ADVERT-Grey.qxp_08112022 08/11/2022 10:43 Page 1
FARNBOROUGH | Hants | GU14 6TQ 7th | 8th
| 9th FEBRUARY
9.30am - 4.30pm (3.30pm close Thurs)
Where Industry and Innovation converge
Over 600 national and international suppliers come together to exhibit at Farnborough International Exhibition and Conference Centre this February for Southern Manufacturing and Electronics (inc AutoAero) 2023. Meet the power behind UK manufacturing industry and see live demonstrations and new product launches of machine tools & tooling, electronics, factory & process automation, packaging & handling, labelling & marking, 3D print technology, test & measurement, materials, composites & adhesives, rapid prototyping, ICT, drives & controls and laboratory equipment.
Free industry seminar programme online @
www.industrysouth.co.uk
The exhibition is free to attend, free to park and easy to get to. Doors open at 9.30am on Tuesday 7th February.
PRE-REGISTER TODAY for your Fast Track Entry Badge, Preview Magazine and Event Catalogue at
www.industrysouth.co.uk
FREE SEMINARS
FREE PARKING
AUTOMATION • DEFENCE ELECTRONICS • AUTOSPORT MARINE • AEROSPACE
TRANSPORTATION • PACKAGING ADDITIVE MANUFACTURING
R&D • ENERGY • LOGISTICS • FOOD & DRINK
SMART MANUFACTURING • SPACE ENGINEERING ELECTRICAL & MECHANICAL ENGINEERING MEDICAL • COMPOSITES • CONSTRUCTION
SOUTHERN MANUFACTURING & ELECTRONICS is an ETES event organised by European Trade & Exhibition Services Ltd
Tel 01784 880890 · email
philv@etes.co.uk
FACTORY&HANDLINGSOLUTIONS | NOVEMBER 2022 11
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