Highlighting the advantage The brightest processes and tools for HBLEDs
Oxford Instruments Plasma Technology has developed systems for Etch or PECVD, offering very high throughput, excellent uniformity and superb repeatability, as well as industry leading batch size.
PlasmaPro NGP1000
PLASMA
www.oxford-instruments.com/plasma
For more information, Oxford Instruments Plasma Technology: Tel: +44 (0)1934 837 000 Email:
plasma@oxinst.com
Pendulum Control Valves Series 65.0 / 65.1 for downstream pressure control
Efficient High wafer throughput and yield based on fast and accurate response
Compact Control and isolation valve with integrated control unit
Simple Easy to maintain
Series 65.1 with extended control range
Swiss Headquarters Tel ++41 81 771 61 61
CH@vatvalve.com
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KR@vatvalve.com
VAT France Tel 01 69 20 69 11
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VAT Germany Tel (089) 46 50 15
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www.vatvalve.com
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