APPLICATIONS


PRODUCE200 ACID


BATCH SPRAY ACID PROCESSOR Metal Etch (Al, Ti, TiW, Pt,…) Oxide Etch SPM Resist Strip SicOzoneTM


Resist Strip


(Positive Resists, Negative Resists) Clean


PRODUCE200


SOLVENT


BATCH SPRAY SOLVENT PROCESSOR Resist Strip


(Positive Resists, Negative Resists) Polymer Removal


Resist Ash Residue Removal Clean


VERTICAL200


SOLVENT


SINGLE WAFER SPRAY SOLVENT PROCESSOR Metal Lift Off Resist Strip


Polymer Removal Megasonic/High Pressure Clean www.siconnex.com TM


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