Digital Mass Flow and Pressure Meters/Controllers


Gas flows from 0-5 sccm to 0-1670 slm Multi-Gas / Multi-Range, freely programmable ranges and gas types Fast response Pressures from 0-5 to 0-6000 psi High accuracy, excellent repeatability Analog and digital communication (e.g. RS232, DeviceNetTM


)


Elastomer- or metal-sealed Surface mount options available (SEMI standard)


Innovation – Experience – Excellence


I www.bronkhorst.com - E info@bronkhorst.com T +31(0)573 45 88 00 - F +31(0)573 45 88 08


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