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Custom high-voltage power supplies for ion implantation applications
Dave Hopkins, Engineering Manager at HiTek Power Ltd. discusses the benefits of a range of custom high-voltage power supplies for ion implantation applications and how they are responding to the tough demands of the photovoltaic market and silicon wafer manufacturing
igh-voltage power supplies are used in a number of areas within ion implantation equip- ment that is used in the manu- facture of silicon wafers for general microelectronics applications and photovoltaic cells.
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Although these implantation appli- cations have some different require- ments for their end product, the underlying specifications for the high- voltage power supplies used in vari- ous parts of the equipment are broadly similar across the applications. Ion implantation used in the manu- facture of semiconductor wafers is a very precise process. The quality of the implantation, which has a signifi- cant effect on the quality of the semi- conductor wafers that form the end product, is directly affected by a
The Series OL20K 20kW power supply range offers output voltages from 60kV to 200kV and beyond
number of parameters of the high-volt- age power supplies used in the implantation equipment.
These supplies must provide high long-term stability, very low output ripple and excellent load and line reg- ulation under demanding static and dynamic conditions.
Although well established in the manufacture of wafers for microelec- tronics devices, ion implantation is now also being increasingly used in place of traditional diffusion-doping processes in the manufacture of photo- voltaic cells because it offers better process control and therefore improved cell uniformity - combined with fewer production steps and lower costs.
High-voltage power supplies are used in a number of places in the implanter, including ion acceleration and deceleration, and also the sup- pression supply.
Industry expert specialists HiTek Power has a wealth of experi- ence in high-voltage power supplies for a very wide range of applications, and over the years has developed a world leadership position in the design and manufacture of supplies for ion implantation applications. The company's outstanding techni- cal and application knowledge enable it to work closely with customers to develop custom versions of its core products as well as completely custom designs to meet very exacting applica- tion requirements.
The OLS10KD
combines in a single chassis a 10kW supply offering maximum output voltages from 1kV to 80kV with a 1kW supply giving maximum output voltages from 100V to 10kV
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Its experienced design team works closely with market leaders in the ion implant industry, to fully understand the application requirements and demands placed upon the supplies. Two of the company’s product fami- lies are well suited to the requirements of the ion implantation sector. The Series OLS10K was developed to offer alternatives to the Series OL6000, OL8000 and OL10K supplies. It has an integrated converter and
JULY 2011 Electronics
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