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Metal-Sealed
Johnson Matthey, designer, manufacturer cells. Bestrom said a purifier is installed on
Digital Mass Flow Meters
and distributer of highly reliable bulk and each MOCVD reactor to provide high-purity
and Controllers
point-of-use hydrogen and nitrogen purifiers, hydrogen during the growth process. HP
recently shipped several palladium and Series purifiers use palladium membrane
getter purifiers that will enable further technology to allow selective diffusion of
advancements in worldwide photovoltaic hydrogen in a compact system with
(PV) manufacturing. continuous monitoring of operating status.
“These latest shipments reaffirm our Incorporating Johnson Matthey’s palladium
commitment to support the ongoing growth membrane technology, the PSH Series
of the global electronics industry, particularly hydrogen purifiers offer a cost-effective,
the rapidly expanding demand for PV single-system solution for hydrogen flow
applications. There is a great need for the rates from 10 Nm
3
/hr to 60 Nm
3
/hr.
best available technology to support this
growth and Johnson Matthey wants to be PSH Series purifiers also incorporate
the leading supplier of gas purification Johnson Matthey’s patented V-purge
products,” said Stuart Bestrom, Sales technology to ensure quick start-up and
Manager for Johnson Matthey’s Gas rapid removal of hydrogen during power
Purification Technology (GPT) group. failure and other alarm conditions.
Bestrom said palladium membrane The PSH Series purifiers accept inlet gases
technology is preferred by PV and of 99.9% or better purity and employ
semiconductor fabs for use with the a catalytic pre-purifier to protect against
compressed hydrogen supply common in oxygen impurity spikes. Designed for
Asia and particularly in China. installation in Class I, Division II
environments, they are PLC-controlled with
“Purification of compressed hydrogen is a color touch screen HMI interface and
Gas flows from 0-5 sccm to 0-100 SLM
challenging because it has ppm (parts per provide continuous monitoring of purged
Fast response
million) levels of oxygen, hydrocarbon and electrical bays to ensure safety compliance. High accuracy, excellent repeatability
nitrogen impurities that are difficult to Multi-Gas / Multi-Range,
remove using catalytic or getter purifiers. “The China PV market is projected to grow
freely programmable ranges and gas types
30 percent annually for the next several
Analog and digital communication
Customers have reported premature years, so JM expects to see ongoing orders
(e.g. RS232, DeviceNet)
breakthrough and shortened lifetimes with for PV applications. We are the market
regenerable and heated getter purifiers and leader in China where we have installed
Surface mount options available
this maintenance means increased cost-of- a number of purifiers,” said Sean Peng,
(SEMI standard)
ownership,” explained Bestrom. Asian Sales Manager of Gas Purification for
the GPT group, which handles JM’s GPT
Innovation – Experience – Excellence
“Our palladium purifiers remove these ppm- sales and service throughout China.
level impurities (O
2
, H
2
O, CO, CO
2
, N
2
and
THC) without affecting lifetime, yet still Yet another application for JM GPT
provide outlet purity less than one ppb hydrogen and nitrogen purifiers is in the
(parts per billion). That’s why our purifiers production of silicon powder used to
are the ideal solution for compressed manufacture solar wafers.
hydrogen applications.”
A large Europe-based renewable energy
Bestrom reported that a major U.S.-based company is using multiple HP Series V-
manufacturer of thin-film solar cells and Purge hydrogen purifiers and PureGuard
modules has installed several PSH-40 JM heated getter nitrogen purifiers to eliminate
hydrogen purifiers at its fab in Shenzen, oxygen and nitrogen contamination during
China. They will be used to purify hydrogen powder production. The requirements of this
used in amorphous silicon thin film venture need extreme purity.
manufacturing. Thin film solar panels are
well suited for large-scale utility applications, Bestrom went on to add, “The company
including solar farms. requires ppt (parts per trillion) purity to
prevent even the smallest contamination that
A major North American semiconductor can compromise wafer quality. This process
company is using JM HP Series V-purge was developed in research and
I www.bronkhorst.com - E info@bronkhorst.com
purifiers to support their diversification into development and then transferred to a
T +31(0)573 45 88 00 - F +31(0)573 45 88 08
indium nitride (InN) high-efficiency solar higher-volume production line.”
October 2009 www.compoundsemiconductor.net 13
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