TECH FOCUS: INTERFEROMETRY Sponsored by Hübner Photonics FEATURED PRODUCT
crucial for interferometry, in order to manipulate and analyse light waves. Key optical components and principles used in interferometry include beam splitters, optical mirrors, collimators and lenses, polarisers and wave plates, detectors, interference filters, fibre optics and spatial light modulators.
Commercial
products Vendors of interferometers and related optical equipment include Bruker, a manufacturer of high-performance scientific instruments and analytical and diagnostic solutions designed to enable scientists to explore materials at molecular, cellular and microscopic levels. The company provides interferometers and optical profiling systems for surface analysis and nanoscale metrology. 4D Technology designs and
manufactures dynamic laser interferometers and optical profilers, and surface defect gauges. Applications include precision machined surfaces, optics, astronomy, aerospace, space-based telescopes, flexible electronics, automotive, and in- line production measurement. DPSS lasers from Cobolt (part
of Hübner Photonics) are all single longitudinal mode, with coherence lengths >10m, and so are a suitable choice of laser for interferometric applications. The company has a wide range of single frequency lasers for interferometric techniques, including holography, Doppler velocimetry and dynamic light scattering.
Horiba Scientific offers
interferometric solutions for spectroscopy, ellipsometry, and surface characterisation in research and industry. The company’s Real Time Interferometric Process Monitor is designed to provide high- precision detection of film thickness and trench depth during the etching/deposition
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process. Depending on applications, the LEM camera includes a 670 or 905 or 980nm laser and, when mounted on any dry etch/deposition process chamber with a direct, top view of the wafer, generates a small laser spot on the sample surface. The Profilm3D and
Profilm3D-200 optical profilometers from KLA are designed to be affordable, non-contact, white light interferometry-based (WLI) 3D surface topography measurement systems. The latest generation includes imaging modes that extend performance and value. The Profilm3D series measures nanometer- to millimetre-scale surface with a simple, flexible recipe setup, accommodating single scans or automated measurements on multiple sites to support both R&D and production environments. Keysight’s laser interferometer and laser calibration systems are designed to offer high precision in a wide dynamic range, alongside the ability to measure a position with multiple degrees of freedom, and high accuracy available in both air and vacuum systems. The latest version of OSLO optical design software from Lambda Research has a default analysis that allows the user to compare each configuration with an absolute reference. This capability is sufficient for designing an interferometer. To model an interferometer in actual use, the user can then compare or ‘interfere’ the wavefront of one configuration of the interferometer with the other. Micro Laser Systems
manufactures free-space and fibre-coupled lasers with diffraction limited performance. Lasers from 350 to 2000nm are available with accessories for expanding or focusing the beam, fibre collimators, fibre focusers, tiny collimators and splitters to integrate with the pigtailed lasers. Custom assemblies for OEM users are also available.
Hübner Photonics, manufacturer of high performance lasers for advanced imaging, detection and analysis, has one of the widest ranges of single frequency lasers in the industry for many interferometric techniques, including holography, Doppler velocimetry, laser ultrasonics and dynamic light scattering. All of the Cobolt 04-01 & 05-01 Series lasers, along with the
C-WAVE Series of widely tunable lasers are single-frequency lasers with linewidths <1 MHz and coherence lengths >10 m, and thereby very suitable for almost any interferometric-based application. The wide wavelength coverage of 355nm–1064nm (and even further in to the NIR), offers full flexibility to select the optimum wavelength for the specific interferometric-based technique. Manufacture using proprietary HTCure technology ensures a
very high level of immunity to varying environmental conditions, ensuring the exceptional performance and reliability of all Hübner Photonics Cobolt lasers.
Further information
https://hubner-photonics.com/applications/lasers-for-interferometry/
MKS Newport provides
interferometers and associated products such as collimators, optical delay lines, fibre optic in-line polarisers, adjustable fibre optic collimators, open- and closed-loop nanofocusing objective lens mounts, sub- nanometer piezoelectric positioning resolutions, and fused silica interferometer flat optics. Oxxius manufactures diode pumped solid state (DPSS) lasers and laser diode modules in the ultraviolet, visible, and near-infrared wavelength ranges. The LCX series of DPSS lasers and the LBX series of laser diode modules have a compact design that can be integrated into instruments for life science, measurement and manufacturing. Teem Photonics develops
PicoMove interferometers, compact, stable and high- performance interferometers for measurement of picometer-scale displacements and vibrations.
The interferometers are based on single-chip integration of a high-stability architecture, which results in measurements with an intrinsic ultra-low noise. The eye-safe operating wavelength of 1.55µm provides compatibility with commercial telecom sources. Thorlabs provides a
wide range of optics and photonics products, including interferometers, optical components, detectors, and measurement systems. Zygo Corporation specialises
in the design and manufacture of advanced optical metrology instruments and systems, ultraprecise optical components and assemblies, and provides electro-optical design and manufacturing services. This is not an exhaustive
list. If you provide products in interferometry space and would like your company to be included, please let us know at: editor.
electro@europascience.com EO
October 2023 Electro Optics 39
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