SENSOR FOR SEMICONDUCTOR TOOL SET-UP


CyberOptics has been demonstrating its WaferSense Auto Resistance Sensor (ARS) with CyberSpectrum software for semiconductor tool set-up and diagnostics. The 300mm ARS with


CyberSpectrum software enables real-time resistance measurements of plating cell contacts in semiconductor electrochemical deposition (ECD) applications. The ARS quickly identifies


and monitors resistance measurements with 50 separate pads around the


perimeter using a Kelvin sensing (4-wire resistance) method to detect residue affecting plating pins. Process and equipment


engineers in semiconductor fabrication plants can predict when a tool needs maintenance with quantitative analysis of measured mean resistance over time, shorten equipment maintenance cycles and improve cell-to-cell uniformity with the wafer-like, 4-wire resistance sensor and CyberSpectrum software’s objective and repeatable data.


❱❱ Auto Resistance Sensor measures contact resistance during plating According to Dr Subodh


Kulkarni of CyberOptics, the ARS can wirelessly capture and monitor real-time resistance measurements for the


electrochemical deposition application in semiconductor fabrication plants, saving time and expense, as well as improving processes.


RADIO RESOURCE MANAGEMENT CONFORMANCE TESTER


The Global Certification Forum (GCF) and PTCRB certification organisation (the PCS Type Certification Review Board) have accepted first test case validations in various FR1 and LTE band combinations using the new Rohde & Schwarz (R&S) TS RRM 5G radio resource management (RRM) conformance test system. The solution is the latest addition to a successful family of RRM conformance test systems. R&S has validated its first 5G


RRM conformance tests with the GCF and the PTCRB organisations. Mobile communication


technology requires conformance tests since mobile network operators worldwide rely


5G RRM conformance tests


HIGH ACCURACY GAS ANALYSER CALIBRATION ❱❱ Rohde & Schwarz validates first


on the certification schemes of GCF and PTCRB for mobile devices in their networks. The updated version of the R&S TS RRM has gone through this certification process, ensuring that it is suitable for the 5G RRM requirements defined in the 3GPP specifications and is now certified by GCF as platform 296. RRM testing, as required by GCF and PTCRB, is a combination of several protocol and RF test methods. It is used to determine the reaction time of a cellphone to a changing RF signal and the time it takes for the device to switch to different signal sources. The updated version of the R&S TS RRM now also features 5G New


Signal Group has launched a new highly accurate but simple to operate version of its gas divider, the Model 821S. Designed for testing the linearity and calibration of almost any gas analyser, the 821S only requires one calibration gas and a zero gas in order to conduct a full range calibration check. The linearity of all gas


analysers should be checked regularly as part of an effective QA/QC regime. To conduct a reliable, accurate check, users simply connect the calibration gas, the zero gas and the outlet flow connector to the analyser to be tested, and then switch the calibration gas in 10 equal steps from zero to the full concentration. These steps are


Radio (NR) signalling functionality, thanks to the inclusion of the R&S CMX500 radio communication tester. As a result, it now covers LTE, WCDMA, and 5G technologies. The integrated test system, operated by the sequencer software R&S CONTEST, offers highly efficient and precise, reproducible measurement results. A unique feature of the R&S TS


RRM is that it offers a smooth upgrade path to 5G for users with a previous version of the well- established R&S TS RRM. The upgrade to 5G RRM testing can be achieved simply by adding the new R&S CMX500 as an extension box.


According to Signal Group,


❱❱ Gas divider for accurate calibration of gas analysers


accurate to within 0.2 per cent and a calibration certificate is supplied with each instrument.


repeatability is 0.5 per cent of the dilution step and the European and US standards specify 2 per cent accuracy, so if the 10 per cent dilution is selected, 500ppm will be diluted to 50ppm with an uncertainty of 0.25ppm – significantly better than the +/- 1ppm required by international standards.


February 2020 /// Testing & Test Houses /// 5


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