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SOLAR INDUSTRY AWARDS I WINNERS


SILICON INNOVATION AWARD


MANZ AG PERC Production Solutions


TO MEET GLOBAL MARKET’S soaring demand for high-efficiency solar cells and lower manufacturing costs, Manz AG offers industry-leading solutions for crystalline solar-cell (cSi) production which yields high conversion efficiencies of up to 20.5%.


The new-generation production technology deploys Manz’s VCS 1200 vertical vacuum coating system to deposit dielectric passivation layers on the rear of cells, together with the firm’s LAS 2400 laser ablation technology, enabling cell manufacturers to achieve large- scale production of high-efficiency cSi solar cells at lowest Cost of Ownership. The fully automated and maintenance- friendly tools boast a smaller footprint and improved efficiency over competitors’ systems. They can be used for both mono- and multi-crystalline solar cells.


Manz offers customers the necessary equipment and processing technology to convert standard cell production lines to manufacture the higher-efficiency PERC cells. Manz’s VCS 1200 system uses a completely new technology for vertical processing, with a throughput of 1,200 wafers/hour. Thanks to its powerful plasma source and a new carrier system, the coating process leaves no pin marks or flakes on the wafers – a problem of many competitors’ systems. In addition,


Dr. Sebastian Gatz, Head of Development cSi Solar and Dieter Manz, CEO of Manz AG


VCS 1200 enables single-side deposition of PECVD-layers without wrap-around of deposition on the other side. Manz’s high performance PECVD process technology achieves optimum reproducibility and the industry’s highest degree of cell efficiency and uniformity.Alongside the VCS 1200 system, Manz’s LAS 2400 laser ablation system provides a simple,


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precise and high-throughput solution for local contact opening of rear side passivation layers.


Being a one-stop process, laser ablation offers the lowest cost of ownership for this step in cell production and offers safe wafer handling with the industry’s lowest breakage rates.


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