PHYSICAL PROPERTIES


Scanning Electron Microscope (SEM) SRM/RM Description


2069b SEM Performance Standard 8091 8820


Scale Calibration Artifact


9951 9952 2800


Aluminum Wafer Drop-In Sample Holder Aluminum Wafer Drop-In Sample Holder


Microscope Magnification Standard 1 µm to 5 mm


6in 6in


25  75  2.3


SEM Sharpness Standard Scanning Electron Microscope


Spacings 2 mm to 4 mm


Unit Size (mm)


12 mm diameter with 3 mm peg semiconductor chip: 2 mm  20 mm 


20 mm 2 mm


Thin Film for Transmission Electron Microscope SRM Description


2063a Microanalysis Thin Film Mineral Glass


Certified Element Ar, Ca, Fe, Mg, O, Si


Unit Size 1 glass film


Semiconductor Thin Film for the Composition of Thin Films SRM Description


2841 2842


Epitaxial Layer Epitaxial Layers


Nominal Elemental Composition (group III mole fraction)


AI (x in AlxGa1-xAs) 0.20


0.30


Depth Profiling SRM Description


2133 2134 2135c 2137


Phosphorus Implant in Silicon Depth Profile Standard


Arsenic Implant in Silicon Profile Standard Nickel-Chromium Thin-Film Depth


Profile Standard


Value


31P: 0.04927 µg/cm2 (9.58 


1014 75As - 7  1014


Cr: 41.3 µg/cm2 Ni: 49.4 µg/cm2


Boron Implant in Silicon Depth Profile Standard 10 B - 1.018 v 1015 atoms/cm2 atoms/cm2 ) atoms/cm2


crystal: 1  1 


2.54  1  1 1 0.04


Unit Size (cm) crystal 1 


1


WWW.NIST.GOV/SRM  PHONE: (301) 975-2200  FAX: (301) 948-3730  EMAIL: SRMINFO@NIST.GOV


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