SEMICONDUCTOR INSPECTION


microns – you can detect very small failures with it’


‘We found a very good trade- off with a pixel size of 20


Far left: A semiconductor wafer shown to be opaque to white visible light. Left: the wafer is mostly transparent to SWIR light at a wavelength of 1,200nm, making it a suitable wavelength for semiconductor inspection. Above: Lucid Vision Lab’s Atlas and Triton SWIR cameras


1.3 megapixel IMX 990 InGaAs sensors. Triton SWIR was launched by Lucid at the beginning of 2023, affording customers a lower-cost alternative to its powerful Atlas series. Te Atlas SWIR camera, unlike the Triton range, offers in-camera cooling for decreasing thermal noise in SWIR detection. Lucid offers a wide range of products


Te SWIR cameras offered by Xenics are


its Wildcat+ 640 series, which use in-house- made InGaAs photodiode detector arrays, 20-micron pixel diameters, and offer speeds of up to 300Hz full frame. Larive says the Wildcat+ 640 offers the highest “normalised sensitivity” (a measure of pixel surface compared with detector noise) available on the market, with high dynamic range. It also comes with a standard industrial interface and triggering abilities – functions that are invaluable to manufacturing clients. Xenics claims to get a normalised sensitivity about 20% higher than most market competitors that use smaller pixel sizes. While resolution and speed are important


metrics, Xenics emphasises that easy integration and compatibility with existing manufacturing infrastructure are also


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very important. “It’s not rocket science,” says Larive. “But it’s very important for manufacturers so they don’t have to spend years redeveloping technology. It should be something plug-and-play.” Xenics adds that its products do not


just cover SWIR. It also targets long-wave infrared (LWIR) through its Dione CAM product series. LWIR cameras are also of great interest to semiconductor wafer manufacturers, in particular because of their ability to look for thermal defects. Te Dione series uses commercially available microbolometers for its sensors. Lucid Vision Labs is another company


making big strides in camera technology for semiconductor inspection. Lucid’s Triton and Atlas ranges both offer SWIR cameras that use Sony 0.3 megapixel IMX 991 and


for wafer inspection, up to 10 Gigabit Ethernet (10GigE) at resolutions of up to 47 megapixels. Its Atlas model cameras, with up to 31 megapixel resolution, are widely sold, delivering over 5GigE. Lucid is working on pushing the resolution of its cameras even further, aiming to release a 65 megapixel version of the Atlas (Atlas10) camera in Q2 2023. Tis camera will be Lucid’s highest-resolution model, featuring Gpixel’s GMAX3265 CMOS sensor. Like other competitors in the industry,


Lucid says SWIR cameras are in high demand for semiconductor inspection, but it also produces UV cameras that are used in other parts of the chip-manufacturing process. In December 2022, Lucid launched a UV model of its Atlas10 GigE camera with an 8.1 megapixel Sony IMX487 sensor, capable of imaging between 200 and 400nm.


Te bandwidth barrier While both sensor and camera development are important to Lucid’s technology, the company states that aside from increases in imaging resolution or


APRIL/MAY 2023 IMAGING AND MACHINE VISION EUROPE 15


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Lucid Vision Labs


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