Monitoring & metering
require precise and careful fabrication, and the potential for exposure to VOCs (volatile organic compounds) during the process calls for the highest standard of sensors and monitoring – something ION Science, as a leader in PID (photoionisation detection) technology, can deliver. Throughout the fabrication process, many different types of VOCs and
T
gases are used in the creation of miniature integrated circuits on silicon wafers. It is critical that during fabrication, the wafers are only exposed to the precise and desired amounts of VOC. Any unaccounted-for VOC, even at incredibly low levels, has the potential to interfere with the creation of the wafer and ruin the circuit. With demand for semiconductors at an all- time high, the risk of losing a batch of product due to improper monitoring is not something producers can afford to chance. Employing the highest level of sensor monitoring in the semiconductor
manufacturing facilities (known as fabs) is the best way to ensure product uniformity and to reduce the risk of defects from VOCs. Sensor monitoring in fabs has the added benefit of protecting workers, those who are working directly with the semiconductors and wafers, and local communities by monitoring and controlling off site emissions. Worker risk is highest in cleanrooms, where a variety of chemicals are
used throughout the stages of creating the wafers. Potential VOCs that workers could be exposed to include ethylene glycol, trichloroethylene and xylene, whilst as a result of certain processes, there is a risk of benzene and formaldehyde exposure. As all of these pose serious health risks, even in low concentrations, monitoring for VOCs and protecting the health of workers takes a high priority in the fabs. As experts in VOC monitoring and PID technology, ION Science has supported many semiconductor facilities in establishing appropriate
AdvAnced PId sensor technology to suPPort the semIconductor Industry AgAInst voc exPosure
here is no denying the importance of semiconductors in modern life. From smartphones to smart factories, these crucial pieces of technology are what make Industry 4.0 possible. Semiconductors
monitoring technologies. ION Science’s leading range of MiniPID2 sensors , are renowned through the industry as the PID sensor of choice for monitoring and instrumentation. With a range of personal, portable and fixed instruments suitable for use in fabs, ION Science can protect everything from individual workers through to whole sites and units. For personal protection, the Cub range is the ideal choice for workers.
Worn within the breathing zone for fast and accurate detection of VOCs, the Cub range weighs a mere 111g, making it lightweight and comfortable to wear while working. To keep sites safe, the Falco fixed detector provides superior sitewide monitoring, and is able to withstand harsh conditions and temperatures without condensing. All ION Science instruments utilise the leading PID sensor technology to guarantee the highest level of detection in all circumstances.
ION Science
ionscience.com
Excellence in flow & level measurement.
Pulsar Measurement is pleased to introduce the
ULTRA 4 & dB3 with double sunshield
• Achieves the highest level of flow accuracy in the UK • Independently tested & verified
• Continues data logging even when remote communication failure occurs
• On-screen analysis
Future proof for UMON3 & UMON4 moving into AMP 7
For more information on the Ultra 4 & its MCERT classification, contact
europe@pulsarmeasurement.com or +44 (0) 1684 891371
Instrumentation Monthly November 2021 P U L SAR M E A S U R E M E N T . C O M
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