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28
nanotimes
10-01 :: January 2010
Companies
Facts
W
ith military forces increasingly having to 15.8% efficient multi-crystalline silicon solar cells at
consider their environmental impact, the rate of more than 34MW per year.
QINETIQ (LSE: QQ) has been awarded a £1.5 milli-

http://www.spirecorp.com
on, three year Indefinite Delivery Indefinite Quantity
(IDIQ) contract to develop and deliver PyTEC™ – an
ISO containerised Pyrolysis Waste Disposal System – T
egal Corporation (NASDAQ: TGAL) announced
that its full process portfolio for silicon DRIE
to the US Army. applications has been made available for the new
ProNova ICP source. The application suite includes
industry-leading processes for high aspect ratio DRIE
under the SHARP patent, as well as well-established
processes for integrated mask open and the tri-pulse
process for high resist mask selectivity deep silicon
etching. A key challenge for 200mm MEMS fabri-
cation is porting established MEMS processes onto
200mm tools and then improving on the baseline
process results; for silicon DRIE, these challenges
include achieving higher etch rates, tighter control
of tilt angles and etch profiles across 200mm wafers,
and tighter control of etch depth uniformity across
200mm wafers The ProNova ICP process suite now
Able to operate 24/7 and process up to 100kg of helps solve these challenges.
Municipal Solid Waste (MSW) per hour, the PyTEC
system (image) also reclaims up to 500 kW of the Furthermore, Tegal has received a repeat order for
thermal energy from the waste per hour, a propor- a Tegal 200 SE DRIE tool from a leading Japanese
tion of which will be used to sustain the process for provider of MEMS devices.
electricity generation. QINETIQ’s PyTEC Pyrolysis

http://www.tegal.com
Waste Disposal System is housed in two standard
free standing interconnected 8ft x 8ft x 20ft skeleton
ISO containers that are fitted with hinged opening U
ltratech, Inc. (NASDAQ: UTEK) announced
unaudited results for the three-month and one-
sides year periods ended December 31, 2009. Ultratech
http://www.qinetiq.com posted net income for the year ended December 31,
2009 of $2.1 million, or $0.09 per share (diluted), as
S
pire Corporation (NASDAQ: SPIR) announced its compared to net income of $11.8 million, or $0.50
30MW per year turnkey solar cell line has been per share (diluted) in fiscal 2008. „We look ahead
accepted by Hanwha Chemical Corporation Ltd. of to 2010 with a great deal of excitement. With new
South Korea (Hanwha). The line exceeded both its products in place addressing both the semiconductor
efficiency and throughput specifications producing and emerging markets such as high-brightness LEDs,
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