Radiance
Flexible cluster platform architecture
Radiance - for when
compromises wont do!
With a choice of “Single” and “Multi-process” modules
confi gured just the way you want, and the ability to optimise geometry
and environment according to each process you run, the fl exible new
Radiance cluster tool puts you fi rmly in control for development and
mass production. Direct or indirect wafer handling, cassette to cassette
Evatec Ltd.
transport for simple line integration and a choice of etch and deposition
Excellence In Thin Film Processing
technologies means there is an ideal Radiance solution whatever your
Lochrietstrasse 14, CH-8890 Flums, Switzerland
Tel: + 41 81 720 1080 info@evatecnet.com
manufacturing challenge.
www.evatecnet.com/radiance
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