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Instrumental in change Leading plasma process innovation


Oxford Instruments Plasma Technology is turning smart science into world class products with its flexible systems for precise and repeatable etching, deposition and growth of micro and nano structures


Plasma Etch & Deposition Atomic Layer Deposition Ion Beam Etch & Deposition Deep Silicon Etch


For more information, please contact Oxford Instruments Plasma Technology: Tel: +44 (0)1934 837 000 Email: plasma@oxinst.com


www.oxford-instruments.com/plasma


PLASMA


Transfer valve for 450 mm wafer technology L-MOTION valve for corrosive high-end semiconductor applications


Real L-MOTION valve technology assures uniform seal compression


Excellent gate seal lifetime


Highest yield through low particle count and high speed Lowest vibration


Fast and easy gate exchange via top service cover


www.vatvalve.com


Semicon Europa 2013, 08.–10.10.2013 Messe Dresden, Hall 1, Booth 1639


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