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Optimize the Thermal Performance of your Process Equipment.


Extensive computational tools enable product designs to be highly refined for ultimate performance.


W


Multi-zone circuit layouts in a polyimide construction are highly customized to deliver exacting performance up to 250°C.


atlow provides innovative solutions to help process tool


EZ-ZONE® RM Multi-


loop controllers are fully scalable with up to 152 PID Loops and 256 monitor points per system.


manufacturers meet the needs of the semiconductor technology roadmap. Our approach is to work collaboratively to help solve complex thermal challenges associated with state-of-the- art manufacturing processes; helping to improve yield, throughput and cost of ownership. This includes innovative heaters, controllers and sensors for use in front-end and back-end applications such as CVD, PECVD, Etch, Diffusion, Bonding, IC test and more.


ASSURANT™ gas and pump line heaters feature high temperature capabilities with low outgassing.


Contact Watlow® today for the latest thermal solutions for semiconductor applications.


European Technical Sales Offices


Germany +49 (0) 7253-9400-0 info@watlow.de


France +33 1 41 32 79 70 info@watlow.fr


Italy +39 02 4588841 italyinfo@watlow.com


Spain +34 91 675 1292 info@watlow.es


UK


+44 (0) 115-964-0777 info@watlow.co.uk


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