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Instrumental in change Leading plasma process innovation


Oxford Instruments Plasma Technology is turning smart science into world class products with its flexible systems for precise and repeatable etching, deposition and growth of micro and nano structures


Plasma Etch & Deposition Atomic Layer Deposition Ion Beam Etch & Deposition Deep Silicon Etch


For more information, please contact Oxford Instruments Plasma Technology: Tel: +44 (0)1934 837 000 Email: plasma@oxinst.com


www.oxford-instruments.com/plasma


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