MEMS OEM
Processing technique remains a critical element within MEMS manufacturing. Successful process development requires extensive process and integration experience and equipment that is designed or optimized to maximize manufacturing performance. The suitability of various process techniques for the end structure must be identified during the device design phase, so as to significantly reduce the early-stage development of the structure. Process development is still required, but addressing manufacturing issues up-front ensures a more rapid and effective integration process.
Optimizing Equipment Processes With MEMS manufacturers developing increasingly functional and complex devices, they stand to benefit significantly from process tools that can provide solutions for commercial MEMS R&D through to volume manufacturing utilizing the same process technology and hardware. This ability to achieve a seamless process transfer from R&D to production represents a challenge frequently overlooked in the MEMS market.
memsstar has designed and sold unique, patented processing systems for vapour phase isotropic etch and surface modification used in MEMS manufacturing
since 2008. Its single-wafer platforms are fundamentally designed similar to semiconductor platforms, utilizing the same best of breed components. Also delivering process performance on par with standard semiconductor processes, memsstar provides a complete hardware and process solution for seamless integration into a manufacturing line.
With this approach, memsstar minimizes the requirement for specialist support within the customers manufacturing team. With zero consumables and extremely high uptime, memsstar equipment is available 24/7 for manufacturing.
Issue III 2012
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