LEDs ♦ industry news
plasma etching in Silicon. They have perfect binary periodic patterns between 180 to 2.500 nm. These holographic gratings are characterized by absolutely seamless patterns and a low defect density on a large area, due to a special fabrication technology.
semiconductor industry and related markets. In close cooperation with research institutes and industry partners SUSS MicroTec is contributing to the advancement of next-generation technologies such as 3D Integration and nanoimprint lithography as well as key processes for MEMS and LED manufacturing. With a global infrastructure for applications and service SUSS MicroTec supports more than 8,000 installed systems worldwide. SUSS MicroTec is headquartered in Garching near Munich, Germany.
Hundreds of flexible stamps can be replicated from only one master. With SCIL-technology the large area stamp is brought into contact with the AMONIL resist, which is thereafter cured with UV light. The resist material has already been optimized by AMO for the implementation of Quartz- and soft PDMS- stamps in conventional imprint processes.
The imprint resist material is distributed by AMO with a standard thickness from 100 to 800 nm. Due to the unique sequential contacting and separation technology a distortion free replication of the stamp at high throughput is now possible with UV-SCIL.
By unifying the competences of each partner the UV-SCIL method from this successful cooperation could be demonstrated on a large scale. AMO´s and SUSS MicroTec´s customers are now offered the master, material and tool process technology for application developments, such as in the field of LED/VCSEL, diffractive and refractive optical elements, pattern magnetic media or functional material as well as printed electronics or RFIDs.
AMO, as a research company, realizes nanofabrication technologies for applications in the field of information technology, biotechnology and photonics. AMO´s services range from the development of lithography technologies, such as UV-nanoimprint, to processing solutions as part of feasibility studies and even to small batch production. Transfer of technology, based on its own wide set process platform with CMOS-compatibility, also belongs to AMO´s services.
SUSS MicroTec, is a leading supplier of equipment and process solutions for microstructuring in the
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www.compoundsemiconductor.net November/December 2010
Epistar AlGaInP LED Breaks Efficacy Record by 26%
The company says that its latest record was reached in the new generation of Aquarius- series chips and reaches 168 lm/W at a dominant wavelength of 610 nm driven by a 20mA current.
Epistar says that it has successfully developed a new generation of Aquarius-series AlGaInP LEDs emitting at an efficacy claimed to be 26 % higher than the previously announced record on March 15, 2010.
The new record was set by a 0.36mm x 0.36 mm chip in the Aquarius-series and reaches 168 lm/W at a dominant wavelength of 610 nm driven by 20mA current (180 lm/w at 6mA). Applying Epistar Lab’s novel light-extracting technology, the new Lambertian transmission has been demonstrated to increase the efficacy from 133 lm/w to 168 lm/w.
Fig. 1: New generation of Aquarius-series chips have higher efficacy and lower forward voltage as compared to previously announced AX14.
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