news review 6-Inch Full-Field Projection Exposure System
USHIO America, a provider of specialty and general illumination lighting solutions as a wholly owned subsidiary of USHIO Inc, today announced that the company has started marketing the world’s first 6-inch full- field projection exposure system for manufacturing LED chips in the US.
USHIO successfully developed its new exposure system — model UX4-LEDs —that allows full-field exposure of 6-inch wafers while preventing wafer warpage or distortion, achieving a throughput enhancement of 300% compared with conventional stepper systems. The UX4- LEDs exposure system is based on the same platform as USHIO’s field-proven UX series full-field projection exposure systems
for semiconductors, FPDs, printed-circuit boards and MEMS. USHIO already has installed more than 1,000 units of the UX series systems throughout the world.
“The UX4-LEDs projection exposure system is one of the most innovative items of LED manufacturing equipment today. Based on a
collection of our lighting-edge technologies that USHIO has fostered in its field-proven UX exposure system series, it is the world’s first 6-inch wafer full-field projection exposure system. It will allow major LED manufacturers to dramatically increase their mass-production capacity while lowering their manufacturing cost,” said Kenji Hamashima, President/CEO of USHIO America. “We are confident of introducing this new product into the US market and gaining top market share by reinforcing our sales and technical support forces. We expect to ship the first unit within this year, since several major LED manufactures have already been evaluating this system for mass-production.”
EV GROUP announces 20%+ increase in revenue
EV GROUP today announced that the company witnessed a more than 20-percent increase in overall revenue during fiscal 2010, ended September 30. EVG attributes this growth, in large part, to continued demand for equipment used in advanced manufacturing of 3D ICs, CMOS image sensors and MEMS devices.
In fact, the company reports it has grown, on average, approximately 20 percent year- over-year since 2003-successfully avoiding a drop in order intake and revenue even in 2008 and 2009 despite the global economic recession. According to Hermann Waltl, EVG’s executive sales and customer
support director, the company capitalizes on its technology and market leadership by continuously building upon its extensive experience in bringing new and innovative products to market. “It’s been another solid year for our company and demonstrative of our continuous investment in R&D. We firmly believe that our strong emphasis on R&D provides us with an edge in supporting our customers’ increasingly sophisticated manufacturing requirements.
As a result, we’ve witnessed continuous year-over-year growth since our inception in 1980-as well as expansion into key, high- growth markets, which has played a
Aixtron Installs 2 MOCVD Systems
AIXTRON has installed two AIX 2800G4 HT 2 inch MOCVD tools at Jiangxi Changda, a new customer in the southern province of PR China. The new HB GaN LED growth reactors have been successfully installed and commissioned by the local Aixtron support team at the company’s facility.
Lu Bo, Executive VP of Jiangxi Changda comments, “I have been impressed with the reputation of this equipment thus our team has been looking forward to the arrival of the new AIX 2800G4 HT MOCVD reactors. We need them to comply with our planned capacity increase as we manufacture more LEDs to meet the strongly growing demand. The Aixtron systems match our specification for process flexibility, thickness uniformity, doping, and
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www.compoundsemiconductor.net November / December 2010
composition. We had a swift and efficient installation thanks to the Aixtron close local support and service.”
Christian Geng, VP Greater China and General Manager at Aixtron Taiwan adds, “This is an important sale for Aixtron for several reasons: Jiangxi Changda is a subsidiary of Lattice Power Corporation in Nanchang, Jiangxi Province, which is one of our long- time customers and one of the first in China.
This company relies on several Aixtron MOCVD systems to develop and manufacture HB LEDs for full color displays. Lattice Power is also scaling up its R&D for the production of HB GaN LEDs on silicon substrate for even more cost efficient devices.”
significant role in allowing us to navigate through this cyclical economy.” EVG also announced that its EVG770 Automated NIL Stepper won the prestigious fifth annual EuroAsia Semiconductor IC Industry Award in the category of back-end-of-line (BEOL) wafer processing.
The IC Industry award winners are voted by customers and users of the tools. This win points to the company’s excellence in service and the technology prowess of the EVG770 system, which is designed for step-and-repeat large-area UV- nanoimprint lithography (UV-NIL) processes for various applications, including 3D ICs, MEMS and CMOS image sensors.
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