product news ♦ Equipments and materials
TELEFUNKEN announce availability of in-line Si and SiGe epitaxial deposition service.
TELEFUNKEN Semiconductors announces the availability of high quality in-line Si and SiGe epitaxial deposition service for customers, commercial and noncommercial, worldwide to address growing in-line epitaxial layer market requirement for the high speed amplifier and power driver applications.
“We are ready to provide high quality silicon and silicon-germanium epitaxial service to support our 150 mm wafer customers. As we know, epitaxy is a key enabling technology for today’s high performance devices,” said Dr. Volker Dudek, CTO of TELEFUNKEN Semiconductors.
TELEFUNKEN Semiconductors’ state-of-the-art Fab has both single wafer reactors and batch wafer reactors tools to meet various in-line epitaxial requirements. The epitaxial service offers Si epitaxial and ultra-thin SiGe:Si composite layers on buried doped regions. We also provide comprehensive metrology services for our customers. The range of epitaxial thickness can vary from below 20nm to 9μm with resistivity from 0.005 Ωcm to 15 Ωcm. By outsourcing the epitaxial growth process to TELEFUNKEN Semiconductors, customers can benefit greatly from the elimination of expensive equipment investment and significant operation and maintenance costs. Being expert in Silicon Germanium processing and standard epitaxial service, TELEFUNKEN Semiconductors is the best choice for successfully growing semiconductor business. TELEFUNKEN Semiconductors GmbH & Co. KG is certified according ISO 9001:2008 and ISO 14001:2009 since December 2009
Product News Equipment and
materials Edwards Expands ixa Vacuum Pump Family
The new stp-iXA2206 and ixa3306 fully-integrated pumps feature superior performance and reduced footprint.
Edwards, a leading global supplier of vacuum and abatement equipment and services has expanded its iXA family of magnetically-levitated turbomolecular pumps with the introduction of the STP-iXA2206 and STP-iXA3306 pumps.
Developed for solar, glass coating, semiconductor and LCD etch applications, the iXA2206/iXA3306 pumps deliver best-in-class performance superior to that offered by earlier iXA family pumps.
“The new STP-iXA2206/iXA3306 are fully- integrated vacuum pumps that are easy to install and offer a small footprint as an all-in-one solution for all application tools,” said Masahide Tanaka, senior product manager, TMP Business Division, Edwards Japan, Ltd. “The integration of the onboard controller eliminates the need for control unit rack mounting and a connection cable between the pump and the control unit, saving installation
November/December 2010
www.compoundsemiconductor.net 215
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