LEDs ♦ product news


boards and MEMS. USHIO already has installed more than 1,000 units of the UX series systems throughout the world.


“The UX4-LEDs projection exposure system is one of the most innovative items of LED manufacturing equipment today. Based on a collection of our lighting-edge technologies that USHIO has fostered in its field-proven UX exposure system series, it is the world’s first 6-inch wafer full-field projection exposure system. It will allow major LED manufacturers to dramatically increase their mass-production capacity while lowering their manufacturing cost,” said Kenji Hamashima, President/CEO of USHIO America. “We are confident of introducing this new product into the US market and gaining top market share by reinforcing our sales and technical support forces. We expect to ship the first unit within this year, since several major LED manufactures have already been evaluating this system for mass-production.”


FULL-FIELD PROJECTION EXPOSURE SYSTEM “UX4-LEDs” FOR MANUFACTURING LED CHIPS


1 Full-field Projection Exposure Up to 6-inch Wafers Requires no contact between the mask and wafer, thus avoiding potential damage to both and preventing any defect on a circuit pattern.


Requires neither mask replacement nor cleaning that would cause system downtime. Allows full-field exposure to enhance throughput (300% higher than that of conventional stepper systems)


2 High Overlay Accuracy and High Resolution


USHIO originally developed the projection lens and the alignment and wafer transfer mechanism optimized for manufacturing LEDs.


Allows enhancement of detection accuracy of alignment marks with low visibility, such as those for transparent electrodes, to achieve high overlay accuracy.


Original wafer chucking method for eliminating warpage or distortion of wafers, and a projection lens with a deep depth of focus minimize variation in line width.


3 Flexible System Design


Designed to automatically handle wafer size conversions so as to allow an increase in wafer size


170 www.compoundsemiconductor.net November/December 2010


without changing system settings or replacing parts, thus requiring no downtime.


Use of modular structure for major system components allows easy specification changes or upgrading as well as easy maintenance


4 High Cost-Benefit Performance


Designed specifically for LED manufacturing to greatly reduce the initial cost compared with use of a semiconductor stepper system for manufacturing LEDs.


Running cost is reduced by 80% of the conventional stepper systems to lower the cost of ownership (CoO). The footprint reduced by 50% or more from the conventional UX series to achieve 3.0 m2 or less.


New Cree XLamp LED Performance Breakthrough


Cree announces the addition of 80, 85 and 90 color rendering index (CRI) options to its XLamp XP-G and XP-E warm white LEDs. Many lighting applications, such as retail, medical and architectural, require high color accuracy to properly render object colors.


With previous generation high-CRI white LEDs, increasing color quality meant decreasing efficacy. Thanks to the new high-CRI XP-G and XP-E, luminaire and fixture designers can have both.


“High CRI is a must for certain applications that require a high quality of the light—but at the same time we cannot forget about the system efficacy,” said Massimo Santinon, brand manager i-Led, Linea Light s.r.l. “The new XLamp XP-E and XP-G with high CRI are the perfect combination we were waiting for that will allow us to address new markets.”


“Lighting applications require specific performance characteristics, and Cree’s XLamp LED family delivers products optimized for these individual applications,” said Paul Thieken, Cree director of marketing, LED components. “Our high CRI XLamp LEDs can deliver light quality comparable to halogen with better efficacy than fluorescents. And


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